C23C 16/455
Characterised by the method used for introducing gases into reaction chamber or
Official title: characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
C23C16/455 (Characterised by the method used for introducing gases into reaction chamber or) appears on 11,346 US grants and 16,118 published applications in this corpus.
Search patents in C23C- Granted patents
- 11,346
- Published applications
- 16,118
- Assignees
- 2,140
- Inventors
- 19,316
- Latest grant
- 6 Oct 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1977 | 5 | 0 |
| 1978 | 5 | 0 |
| 1979 | 3 | 0 |
| 1980 | 9 | 0 |
| 1981 | 6 | 0 |
| 1982 | 11 | 0 |
| 1983 | 5 | 0 |
| 1984 | 14 | 0 |
| 1985 | 18 | 0 |
| 1986 | 11 | 0 |
| 1987 | 12 | 0 |
| 1988 | 18 | 0 |
| 1989 | 23 | 0 |
| 1990 | 33 | 0 |
| 1991 | 39 | 0 |
| 1992 | 48 | 0 |
| 1993 | 51 | 0 |
| 1994 | 67 | 0 |
| 1995 | 67 | 0 |
| 1996 | 86 | 0 |
| 1997 | 75 | 0 |
| 1998 | 103 | 0 |
| 1999 | 115 | 0 |
| 2000 | 175 | 0 |
| 2001 | 167 | 102 |
| 2002 | 174 | 244 |
| 2003 | 176 | 320 |
| 2004 | 181 | 360 |
| 2005 | 195 | 421 |
| 2006 | 173 | 431 |
| 2007 | 149 | 391 |
| 2008 | 198 | 429 |
| 2009 | 202 | 466 |
| 2010 | 289 | 433 |
| 2011 | 255 | 476 |
| 2012 | 292 | 541 |
| 2013 | 330 | 509 |
| 2014 | 402 | 561 |
| 2015 | 452 | 777 |
| 2016 | 481 | 764 |
| 2017 | 519 | 761 |
| 2018 | 506 | 771 |
| 2019 | 635 | 850 |
| 2020 | 692 | 894 |
| 2021 | 584 | 867 |
| 2022 | 632 | 1053 |
| 2023 | 636 | 1056 |
| 2024 | 712 | 957 |
| 2025 | 764 | 956 |
| 2026 | 551 | 728 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
- C23C 16/45523Pulsed gas flow or change of composition over time7,005
- C23C 16/45563Gas nozzles3,305
- C23C 16/45561Gas plumbing upstream of the reaction chamber1,179
- C23C 16/45502Flow conditions in reaction chamber826
- C23C 16/45587Mechanical means for changing the gas flow662
- C23C 16/45519Inert gas curtains620
- C23C 16/45557Pulsed pressure or control pressure434
- C23C 16/45512Premixing before introduction in the reaction chamber282
All 16 subgroupsShow fewer
- C23C 16/45517Confinement of gases to vicinity of substrate148
- C23C 16/45514Mixing in close vicinity to the substrate146
- C23C 16/45582Expansion of gas before it reaches the substrate103
- C23C 16/45559Diffusion of reactive gas to substrate99
- C23C 16/45595Atmospheric cvd gas inlets with no enclosed reaction chamber94
- C23C 16/45593Recirculation of reactive gases65
- C23C 16/45585Compression of gas before it reaches the substrate26
- C23C 16/45597Reactive back side gas25
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Most cited
By later US patents
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