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US 2026/0308753 A1Published application
Fluorine-containing amorphous carbon film and method for producing same
AssigneeKeio University
InventorsTetsuya SUZUKI, Akira SHIRAKURA
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Abstract
A fluorine-containing amorphous carbon film is a monolayer film formed of carbon, fluorine, and oxygen. An average fluorine content percentage in a film thickness direction of the monolayer film is 30 atomic % or greater and 40 atomic % or less, an average oxygen content percentage in the film thickness direction is 5 atomic % or greater and 20 atomic % or less, and a remainder is a carbon atom.
Claims13
A fluorine-containing amorphous carbon film, comprising:
- a monolayer film formed of carbon, fluorine, and oxygen, wherein
- an average fluorine content percentage of the monolayer film in a film thickness direction of the monolayer film is 30 atomic % or greater and 40 atomic % or less, an average oxygen content percentage of the monolayer film in the film thickness direction is 5 atomic % or greater and 20 atomic % or less, and a remainder of the monolayer film is a carbon.
A method for producing a fluorine-containing amorphous carbon film, the method comprising:
- providing a substrate in a chamber;
- introducing, into the chamber, a raw material gas of a molecule having a chemical formula represented only by carbon and fluorine, and an inert gas for diluting the raw material gas, and forming the fluorine-containing amorphous carbon film over a surface of the substrate while a plasma is generated;
- and
- setting a mixing ratio of the inert gas to the raw material gas to be greater than 1/4 and less than 11/1 in terms of a flow rate ratio into the chamber.
1 more element
Dependencies are inferred from the claim text.