C23C 16/45595
Atmospheric cvd gas inlets with no enclosed reaction chamber
Official title: {Atmospheric CVD gas inlets with no enclosed reaction chamber}
C23C16/45595 (Atmospheric cvd gas inlets with no enclosed reaction chamber) appears on 94 US grants and 136 published applications in this corpus.
Search patents in C23C- Granted patents
- 94
- Published applications
- 136
- Assignees
- 102
- Inventors
- 366
- Latest grant
- 6 Oct 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1980 | 1 | 0 |
| 1981 | 0 | 0 |
| 1982 | 0 | 0 |
| 1983 | 0 | 0 |
| 1984 | 0 | 0 |
| 1985 | 1 | 0 |
| 1986 | 0 | 0 |
| 1987 | 0 | 0 |
| 1988 | 0 | 0 |
| 1989 | 1 | 0 |
| 1990 | 0 | 0 |
| 1991 | 0 | 0 |
| 1992 | 1 | 0 |
| 1993 | 0 | 0 |
| 1994 | 5 | 0 |
| 1995 | 3 | 0 |
| 1996 | 6 | 0 |
| 1997 | 2 | 0 |
| 1998 | 2 | 0 |
| 1999 | 3 | 0 |
| 2000 | 4 | 0 |
| 2001 | 3 | 2 |
| 2002 | 3 | 4 |
| 2003 | 3 | 6 |
| 2004 | 0 | 5 |
| 2005 | 1 | 3 |
| 2006 | 1 | 4 |
| 2007 | 0 | 2 |
| 2008 | 2 | 4 |
| 2009 | 0 | 7 |
| 2010 | 4 | 3 |
| 2011 | 1 | 4 |
| 2012 | 1 | 4 |
| 2013 | 1 | 3 |
| 2014 | 2 | 8 |
| 2015 | 2 | 10 |
| 2016 | 2 | 9 |
| 2017 | 6 | 1 |
| 2018 | 5 | 8 |
| 2019 | 0 | 3 |
| 2020 | 5 | 5 |
| 2021 | 3 | 10 |
| 2022 | 4 | 5 |
| 2023 | 7 | 9 |
| 2024 | 2 | 5 |
| 2025 | 3 | 8 |
| 2026 | 4 | 4 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
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- Electronic devices and circuits6 Aug 2026US 2026/0226608 A1Pragmatic Semiconductor Limited
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Most cited
By later US patents
- Apparatus for atomic layer deposition510US 7,456,429 B2Eastman Kodak Company · 2008
- Chemical vapor deposition method for forming SiO.sub.2437US 5,462,899 ANEC Corporation · 1995
- Chemical vapor deposition method for forming fluorine containing silicon oxide film288US 5,288,518 ANEC Corporation · 1994
- Apparatus and method for depositing a film252US 5,578,130 ASemiconductor Energy Laboratory Co.Ltd. · 1996
- Single body injector and deposition chamber96US 6,200,389 B1Silicon Valley Group, Thermal Systems LLC · 2001