Article with transparent conductive oxide coating

A method of making a coated article for a solar cell comprising:

• supplying a glass substrate having a first surface and a second surface;
• applying a first coating over the first surface of the glass substrate;
• forming a second coating over the second surface of the glass substrate, wherein the second coating is formed by:
• applying an underlayer over the second surface of the glass substrate;
• forming a first conductive oxide layer over the underlayer by a chemical vapor deposition process by applying a first metal precursor material comprising a metal to form a first film, and applying a second metal precursor material comprising a metal to form a second film, wherein the first film comprises tin oxide and tungsten and wherein the first film is formed using a tin precursor material and a tungsten precursor material selected from tungsten tetrachloride, and a second film formed over the first film, the second film comprising tin oxide and fluorine;
• applying an overlayer over the first conductive oxide layer;
• applying a semiconductor layer over the overlayer;
• and
• applying a second conductive layer over the semiconductor layer;
• and
• forming a functional layer over the first surface of the substrate, the functional layer comprising a layer having an average surface roughness in the range of 5 nm to 500 nm and a thickness in the range of 10 nm to 500 nm.