Semiconductor manufacturing apparatus

A semiconductor manufacturing apparatus comprising:

• a process chamber;
• a boat disposed in the process chamber and including a plurality of support members spaced apart from one another in a first direction, wherein a plurality of substrates are stacked on the plurality of support members, respectively, in the first direction;
• an inner tube enclosing the boat, the inner tube including a slit formed along a side wall of the boat extending in the first direction;
• and
• a nozzle disposed in the process chamber that is configured to supply a process gas, the nozzle including a gas injection port formed at a position corresponding to the slit,
• wherein the slit is formed at a position corresponding to a space between adjacent support members of the plurality of support members and has a first upward inclination of an acute angle with respect to a second direction that is perpendicular to the first direction to direct the process gas from the nozzle though the slit and into the space between the adjacent support members of the plurality of support members.