Deposition mask and method for manufacturing the same
AssigneeSamsung Display Co., Ltd.
InventorSung Woon KIM
Life of this patent
Estimating the term…
Abstract
A deposition mask includes a mask substrate positioned to surround a mask opening; a coating film disposed on the mask substrate and including an inorganic material; and a mask pattern positioned in a portion overlapping the mask opening and spaced apart from the coating film with a hole pattern interposed therebetween. The mask pattern includes: a top surface; a bottom surface opposing the top surface and facing the mask opening; and a side surface connecting the top surface and the bottom surface to each other and facing the hole pattern, and a first inclination angle formed by the top surface and the side surface is smaller than a second inclination angle formed by the bottom surface and the side surface.
Claims20
A deposition mask comprising:
- a mask substrate positioned to surround a mask opening;
- a coating film disposed on the mask substrate and including an inorganic material;
- and
- a mask pattern positioned in a portion overlapping the mask opening and spaced apart from the coating film with a hole pattern interposed therebetween,
- wherein the mask pattern includes:
- a top surface;
- a bottom surface opposing the top surface and facing the mask opening;
- and
- a side surface connecting the top surface and the bottom surface to each other and facing the hole pattern, and
- wherein a first inclination angle formed by the top surface and the side surface is smaller than a second inclination angle formed by the bottom surface and the side surface.
A method for manufacturing a deposition mask, comprising:
- forming a plurality of protrusion portions on a mask substrate configured as a semiconductor wafer;
- forming a first coating film and a second coating film on the mask substrate;
- planarizing the second coating film by removing a portion of the second coating film;
- and
- forming a mask opening, a mask pattern, and a hole pattern by removing portions of the mask substrate, the first coating film, and the second coating film,
- wherein the protrusion portion protrudes more than an upper surface of the mask substrate in a direction perpendicular to a major surface of the mask substrate.
An electronic device comprising:
- a display device formed using a deposition mask;
- the deposition mask comprising:
- a mask substrate positioned to surround a mask opening;
- a coating film disposed on the mask substrate and including an inorganic material;
- and
- a mask pattern positioned in a portion overlapping the mask opening and spaced apart from the coating film with a hole pattern interposed therebetween,
- wherein the mask pattern includes:
- a top surface;
- a bottom surface opposing the top surface and facing the mask opening;
- and
- a side surface connecting the top surface and the bottom surface to each other and facing the hole pattern, and
- wherein a first inclination angle formed by the top surface and the side surface is smaller than a second inclination angle formed by the bottom surface and the side surface.
Dependencies are inferred from the claim text.