C23C 16/45582
Expansion of gas before it reaches the substrate
Official title: {Expansion of gas before it reaches the substrate}
C23C16/45582 (Expansion of gas before it reaches the substrate) appears on 103 US grants and 132 published applications in this corpus.
Search patents in C23C- Granted patents
- 103
- Published applications
- 132
- Assignees
- 38
- Inventors
- 308
- Latest grant
- 17 Feb 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1980 | 1 | 0 |
| 1981 | 0 | 0 |
| 1982 | 0 | 0 |
| 1983 | 0 | 0 |
| 1984 | 0 | 0 |
| 1985 | 1 | 0 |
| 1986 | 0 | 0 |
| 1987 | 1 | 0 |
| 1988 | 2 | 0 |
| 1989 | 0 | 0 |
| 1990 | 3 | 0 |
| 1991 | 2 | 0 |
| 1992 | 2 | 0 |
| 1993 | 0 | 0 |
| 1994 | 0 | 0 |
| 1995 | 0 | 0 |
| 1996 | 0 | 0 |
| 1997 | 0 | 0 |
| 1998 | 0 | 0 |
| 1999 | 0 | 0 |
| 2000 | 0 | 0 |
| 2001 | 0 | 1 |
| 2002 | 0 | 1 |
| 2003 | 1 | 7 |
| 2004 | 0 | 1 |
| 2005 | 1 | 7 |
| 2006 | 1 | 4 |
| 2007 | 2 | 6 |
| 2008 | 1 | 9 |
| 2009 | 1 | 6 |
| 2010 | 6 | 9 |
| 2011 | 1 | 9 |
| 2012 | 9 | 4 |
| 2013 | 7 | 2 |
| 2014 | 4 | 5 |
| 2015 | 7 | 9 |
| 2016 | 6 | 11 |
| 2017 | 4 | 10 |
| 2018 | 3 | 5 |
| 2019 | 9 | 4 |
| 2020 | 9 | 5 |
| 2021 | 2 | 4 |
| 2022 | 6 | 4 |
| 2023 | 2 | 1 |
| 2024 | 5 | 1 |
| 2025 | 3 | 3 |
| 2026 | 1 | 4 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Slot-die type gas distribution device for photovoltaic manufacturing17 Feb 2026US 12,557,426 B2Cnbm Research Institute for Advanced Glass Materials Group Co., Ltd.
- Gas distribution assembly30 Sep 2025US 12,431,334 B2ASM IP Holding B. V.
- Atomic layer deposition with plasma source12 Aug 2025US 12,383,923 B2Picosun Oy
- Substrate processing methods and apparatus13 May 2025US 12,297,535 B2Picosun Oy
- Processing system and method of delivering a reactant gas12 Nov 2024US 12,139,790 B2APPLIED Materials.Inc.
- Integrated substrate processing apparatus and method20 Aug 2026US 2026/0242952 A1Picosun Oy
- Integrated substrate processing apparatus and method20 Aug 2026US 2026/0245835 A1Picosun Oy
- Slot-die type gas distribution device for photovoltaic manufacturing21 May 2026US 2026/0143846 A1Cnbm Research Institute for Advanced Glass Materials Group Co., Ltd.
- Substrate processing apparatus and method30 Apr 2026US 2026/0117373 A1Picosun Oy
- Gas distribution assembly and method of using same11 Dec 2025US 2025/0379040 A1ASM IP Holding B. V.
Most cited
By later US patents
- Gas delivery apparatus and method for atomic layer deposition586US 6,916,398 B2APPLIED Materials.Inc. · 2005
- Gas supply device503US 8,945,306 B2Tokyo Electron Limited · 2015
- Integration of ALD tantalum nitride for copper metallization495US 7,049,226 B2APPLIED Materials.Inc. · 2006
- Apparatus and method for hybrid chemical processing495US 7,204,886 B2APPLIED Materials.Inc. · 2007
- Vortex chamber lids for atomic layer deposition454US 7,780,789 B2APPLIED Materials.Inc. · 2010