Processing system and method of delivering a reactant gas

An injection cone, comprising:

• a body, comprising:
• a first portion configured to deliver a reactant gas, the first portion comprising:
• a bottom surface;
• and
• a linear rudder, the linear rudder having a length of about 25 mm to about 75 mm;
• and
• a second portion configured to accept the reactant gas, the first portion and the second portion separated by a dividing line.

An injection cone, comprising:

• a body, comprising:
• a first portion configured to deliver a reactant gas, the first portion comprising:
• a bottom surface;
• and
• a linear rudder, the linear rudder having disposed about 12 mm to about 40 mm from the bottom surface;
• and
• a second portion configured to accept the reactant gas, the first portion and the second portion separated by a dividing line.

A processing system, comprising:

• a substrate support system comprising a substrate support;
• an injection cone, the injection cone separated into a top portion and a bottom portion by an injection separation line, the injection cone configured to deliver reaction gas through only the top portion, the injection cone comprising:
• a body, comprising:
• a first portion configured to deliver a reactant gas toward a higher growth portion of the substrate support, the first portion comprising:
• a bottom surface;
• and
• a linear rudder;
• and
• a second portion configured to accept the reactant gas;
• and
• an intake coupled to the injection cone, the intake configured to deliver the reactant gas to the injection cone.

A processing system, comprising:

• a substrate support system comprising a substrate support;
• an injection cone, the injection cone is disposed such that it makes an angle with an edge of the substrate support, wherein the angle is from about 20° to about 30°, the injection cone, comprising:
• a body, comprising:
• a first portion configured to deliver a reactant gas toward a higher growth portion of the substrate support, the first portion comprising:
• a bottom surface;
• and
• a linear rudder;
• and
• a second portion configured to accept the reactant gas;
• and
• an intake coupled to the injection cone, the intake configured to deliver the reactant gas to the injection cone.

A method of delivering a reactant gas, the method comprising:

• flowing the reactant gas through an intake;
• flowing the reactant gas through an injection cone, the injection cone comprising:
• a body, comprising:
• a first portion configured to deliver the reactant gas, the first portion comprising:
• a bottom surface;
• and
• a linear rudder, the linear rudder making an angle with an axis parallel to the bottom surface, the angle being from about 10° to about 40°;
• and
• a second portion configured to accept the reactant gas;
• and
• delivering the reactant gas to a surface of a substrate disposed over a substrate support such that a film is formed on the surface of the substrate.