Slot-die type gas distribution device for photovoltaic manufacturing
AssigneeCnbm Research Institute for Advanced Glass Materials Group Co., Ltd.
InventorsYilei Shen, Nan Chen, Thomas Dalibor
Life of this patent
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Abstract
A slot-die type gas distribution device for photovoltaic manufacturing is provided. The slot-die type gas distribution device includes a first gas distribution device (105) at a process chamber inlet (104) and a second gas distribution device (13) at a process chamber outlet (11). The first gas distribution device (105) is connected to the process chamber inlet (104) through a flat quadrangular first communication device (9), and the second gas distribution device (13) is connected to the process chamber outlet (11) through a flat quadrangular third communication device (12). The device effectively improves the gas distribution uniformity in the process chamber.
Claims11
A slot-die type gas distribution device for photovoltaic manufacturing, comprising a first gas distribution device, wherein the first gas distribution device is provided with a first inlet and a first outlet;
- the first gas distribution device comprises a first gas distribution tube;
- the first inlet is arranged at a top of the first gas distribution tube, so that a flow direction of gas passing through the first inlet is perpendicular to a bottom surface of the first gas distribution tube, and the top of the first gas distribution tube is a highest position of the first gas distribution tube from the ground;
- the first inlet is arranged at a center of the top of the first gas distribution tube;
- wherein the first gas distribution tube is semicircular;
- and the first gas distribution tube includes a first rectangular plane and a first curved surface;
- the first rectangular plane is located beneath the first curved surface and is parallel to the ground;
- and
- the first inlet is arranged on the first curved surface, and a height of the first inlet from the first rectangular plane is a radius of the first gas distribution tube.
Dependencies are inferred from the claim text.