Slot-die type gas distribution device for photovoltaic manufacturing
AssigneeCnbm Research Institute for Advanced Glass Materials Group Co., Ltd.
InventorsYilei SHEN, Nan CHEN, Thomas DALIBOR
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AssigneeCnbm Research Institute for Advanced Glass Materials Group Co., Ltd.
InventorsYilei SHEN, Nan CHEN, Thomas DALIBOR
Estimating the term…
A slot-die type gas distribution device for photovoltaic manufacturing is provided. The slot-die type gas distribution device includes a first gas distribution device at a process chamber inlet and a second gas distribution device at a process chamber outlet. The first gas distribution device is connected to the process chamber inlet through a flat quadrangular first communication device, and the second gas distribution device is connected to the process chamber outlet through a flat quadrangular third communication device. The slot-die type gas distribution device effectively improves gas distribution uniformity in a process chamber.
A slot-die type gas distribution device for photovoltaic manufacturing, comprising a first gas distribution device, wherein the first gas distribution device is provided with a first inlet and a first outlet;
Dependencies are inferred from the claim text.