Injectors, liners, process kits, processing chambers, and related methods for gas flow in batch processing of semiconductor manufacturing

A liner applicable for disposition in a processing chamber, comprising:

• an inner face;
• an outer face opposing the inner face;
• a first side face between the inner face and the outer face;
• a second side face between the inner face and the outer face, the second side face opposing the first side face;
• a plurality of inlet openings on an inlet side, the plurality of inlet openings extending into the outer face, and the plurality of inlet openings comprising:
• a plurality of first inlet openings that include a first row extending into the first side face, and a second row extending into the second side face, the first row of the plurality of first inlet openings comprising first recesses extending into the outer face and the first side face, and the second row of the plurality of first inlet openings comprising second recesses extending into the outer face and the second side face, and
• a plurality of second inlet openings extending between the inner face and the outer face, the plurality of second inlet openings aligned at least partially between columns of the first inlet openings, the first recesses disposed on a first side of the plurality of second inlet openings, and the second recesses disposed on a second side of the plurality of second inlet openings;
• and
• one or more outlet openings on an outlet side, the outlet side opposing the inlet side, and the one or more outlet openings extending into the inner face.

A process kit applicable for disposition in a processing chamber, comprising:

• an injector, comprising:
• an inner face,
• an outer face opposing the inner face,
• a plurality of first inject openings extending between the inner face and the outer face, the plurality of first inject openings comprising a first row of the first inject openings and a second row of the first inject openings, and
• a plurality of second inject openings extending between the inner face and the outer face, the plurality of second inject openings aligned between the first row and the second row of the first inject openings;
• a first liner sized and shaped to be disposed inwardly of the injector, the first liner comprising:
• an inner face,
• an outer face opposing the inner face of the first liner,
• a first side face between the inner face of the first liner and the outer face of the first liner,
• a second side face between the inner face of the first liner and the outer face of the first liner, the second side face opposing the first side face,
• a plurality of inlet openings on an inlet side of the first liner, the plurality of inlet openings extending into the inner face of the first liner and the second side face, and
• one or more outlet openings on an outlet side of the first liner, the outlet side opposing the inlet side, and the one or more outlet openings extending into the inner face of the first liner;
• a second liner sized and shaped to be supported at least partially by the first liner, the second liner comprising:
• an inner face,
• an outer face opposing the inner face of the second liner,
• a first side face between the inner face of the second liner and the outer face of the second liner,
• a second side face between the inner face of the second liner and the outer face of the second liner, the second side face of the second liner opposing the first side face of the second liner,
• a plurality of inlet openings on an inlet side of the second liner, the plurality of inlet openings of the second liner extending into the outer face of the second liner, and
• one or more outlet openings on an outlet side of the second liner, the outlet side of the second liner opposing the inlet side of the second liner, the one or more outlet openings of the second liner extending into the inner face of the second liner;
• and
• a third liner sized and shaped to be supported at least partially by the second liner, the third liner comprising:
• an inner face,
• an outer face opposing the inner face of the third liner,
• a first side face between the inner face of the third liner and the outer face of the third liner,
• a second side face between the inner face of the third liner and the outer face of the third liner, the second side face opposing the first side face of the third liner, wherein the second side face of the third liner comprises a tapered section,
• a plurality of inlet openings on an inlet side of the third liner, the plurality of inlet openings of the third liner extending into the first side face of the third liner, and
• one or more outlet openings on an outlet side of the third liner, the outlet side of the third liner opposing the inlet side of the third liner, the one or more outlet openings of the third liner extending into the inner face of the third liner.