C23C 16/45585
Compression of gas before it reaches the substrate
Official title: {Compression of gas before it reaches the substrate}
C23C16/45585 (Compression of gas before it reaches the substrate) appears on 26 US grants and 27 published applications in this corpus.
Search patents in C23C- Granted patents
- 26
- Published applications
- 27
- Assignees
- 26
- Inventors
- 90
- Latest grant
- 17 Feb 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1985 | 1 | 0 |
| 1986 | 0 | 0 |
| 1987 | 1 | 0 |
| 1988 | 1 | 0 |
| 1989 | 0 | 0 |
| 1990 | 2 | 0 |
| 1991 | 0 | 0 |
| 1992 | 1 | 0 |
| 1993 | 0 | 0 |
| 1994 | 1 | 0 |
| 1995 | 0 | 0 |
| 1996 | 0 | 0 |
| 1997 | 0 | 0 |
| 1998 | 0 | 0 |
| 1999 | 0 | 0 |
| 2000 | 0 | 0 |
| 2001 | 1 | 1 |
| 2002 | 0 | 1 |
| 2003 | 0 | 0 |
| 2004 | 0 | 0 |
| 2005 | 1 | 0 |
| 2006 | 0 | 1 |
| 2007 | 0 | 0 |
| 2008 | 0 | 1 |
| 2009 | 0 | 4 |
| 2010 | 0 | 1 |
| 2011 | 0 | 0 |
| 2012 | 1 | 3 |
| 2013 | 0 | 1 |
| 2014 | 3 | 4 |
| 2015 | 1 | 1 |
| 2016 | 3 | 0 |
| 2017 | 1 | 1 |
| 2018 | 2 | 2 |
| 2019 | 0 | 0 |
| 2020 | 3 | 0 |
| 2021 | 0 | 1 |
| 2022 | 0 | 1 |
| 2023 | 0 | 0 |
| 2024 | 1 | 1 |
| 2025 | 1 | 2 |
| 2026 | 1 | 1 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Slot-die type gas distribution device for photovoltaic manufacturing17 Feb 2026US 12,557,426 B2Cnbm Research Institute for Advanced Glass Materials Group Co., Ltd.
- Gas distribution assembly30 Sep 2025US 12,431,334 B2ASM IP Holding B. V.
- Window for chemical vapor deposition systems and related methods10 Sep 2024US 12,084,770 B2GlobalWafers Co., Ltd.
- Film forming apparatus18 Aug 2020US 10,745,824 B2NuFlare Technology, Inc.
- Thin film encapsulation processing system and process kit19 May 2020US 10,655,222 B2APPLIED Materials.Inc.
- Slot-die type gas distribution device for photovoltaic manufacturing21 May 2026US 2026/0143846 A1Cnbm Research Institute for Advanced Glass Materials Group Co., Ltd.
- Gas distribution assembly and method of using same11 Dec 2025US 2025/0379040 A1ASM IP Holding B. V.
- Slot-die type gas distribution device for photovoltaic manufacturing27 Feb 2025US 2025/0072153 A1Cnbm Research Institute for Advanced Glass Materials Group Co., Ltd.
- Window for chemical vapor deposition systems and related methods5 Dec 2024US 2024/0401201 A1GlobalWafers Co., Ltd.
- Window for chemical vapor deposition systems and related methods24 Feb 2022US 2022/0056583 A1GlobalWafers Co., Ltd.
Most cited
By later US patents
- Vertical oven with a boat for the uniform treatment of wafers349US 6,240,875 B1ASM International N.V. · 2001
- Apparatus for depositing material on a substrate258US 4,761,269 ACrystal Specialties, Inc. · 1988
- Semiconductor processing system and methods using capacitively coupled plasma183US 9,144,147 B2APPLIED Materials.Inc. · 2015
- Reaction apparatus which introduces one reacting substance within a convergent-divergent nozzle96US 4,909,914 ACanon Kabushiki Kaisha · 1990
- Apparatus and process for producing a stable beam of fine particles26US 4,911,805 ACanon Kabushiki Kaisha · 1990