Apparatus and process for producing a stable beam of fine particles
AssigneeCanon Kabushiki Kaisha
InventorsKenji Ando, Yuji Chiba, Tatsuo Masaki, deceased, Masao Sugata, Kuniji Osabe, Osamu Kamiya
Life of this patent
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Abstract
An apparatus for controlling a flow of fine particles is provided which comprises a convergent-divergent nozzle in a flow path of the fine particles. The nozzle may be operated under an optimum expansion condition, and the differential coefficient of the streamline at the channel inside the nozzle varies continuously and is equal to zero at a throat portion of the nozzle.
Claims25
Apparatus for bringing fine particles formed from a first substance into contact with a second substance, comprising:
- a convergent divergent nozzle connected between gas supply means and a chamber, the gas supply means being arranged to supply to the nozzle a carrier gas with fine particles of the first substance dispersed therein;
- gas exciting means upstream of said nozzle, said gas exciting means comprising a pair of electrodes with a gas flow space therebetween, and means for creating a DC glow discharge or a high frequency glow discharge between the electrodes;
- and
- means for regulating pressure conditions upstream and downstream of the nozzle such that a stable beam of the carrier gas with fine particles of the first substance dispersed therein is formed in the chamber and comes into contact with the second substance;
- wherein each electrode of said gas exciting means is semi-circular in cross-section and forms half of a tube, the electrodes being joined to an insulating material to form a tube through which gases may pass.
A method of bringing fine particles formed from a first substance into contact with a second substance, comprising:
- supplying a carrier gas under pressure with fine particles of the first substance dispersed therein to a convergent-divergent nozzle;
- regulating the pressure conditions upstream and downstream of the nozzle such that a stable beam of the carrier gas, having dispersed therein fine particles of the first substance, is formed downstream of the nozzle;
- and
- causing the fine particles in the stable beam to contact the second substance;
- wherein the first substance is gaseous and is treated before passage through the nozzle to produce active particles, the active particles being produced by passing the carrier gas and the first substance through gas exciting means upstream of the nozzle.
- the gas exciting means comprising a pair of electrodes between which the gases pass, and means for creating a DC glow discharge or a high frequency glow discharge between the electrode;
- and
- wherein each electrode is semi-circular in cross-section and forms half of a tube, the electrodes being joined to an insulating material to form a tube through which the gases pass.
Apparatus for bringing fine particles formed from a first substance into contact with a second substance, comprising:
- a convergent divergent nozzle connected between gas supply means and a chamber, the gas supply means being arranged to supply to the nozzle a carrier gas with fine particles of the first substance dispersed therein;
- and
- means for regulating pressure conditions upstream and downstream of the nozzle such that a stable beam of the carrier gas with fine particles of the first substance dispersed therein is formed in the chamber and comes into contact with the second substance;
- wherein the second substance is a solid arranged within the chamber such that the beam formed by the nozzle impinges thereon.
Apparatus for bringing fine particles formed from a first substance into contact with a second substance, comprising:
- a convergent divergent nozzle connected between gas supply means and a chamber, the gas supply means being arranged to supply to the nozzle a carrier gas with fine particles of the first substance dispersed therein;
- and
- means for regulating pressure conditions upstream and downstream of the nozzle such that a stable beam of the carrier gas with fine particles of the first substance dispersed therein is formed in the chamber and comes into contact with the second substance;
- further comprising, at the downstream side of said nozzle, a skimmer having a variable aperture function which can be externally regulated to vary aperture area between open and closed positions.
Dependencies are inferred from the claim text.