Slot-die type gas distribution device for photovoltaic manufacturing
AssigneeCnbm Research Institute for Advanced Glass Materials Group Co., Ltd.
InventorsYilei SHEN, Nan CHEN, Thomas DALIBOR
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Abstract
A slot-die type gas distribution device for photovoltaic manufacturing is provided. The slot-die type gas distribution device includes a first gas distribution device (105) at a process chamber inlet (104) and a second gas distribution device (13) at a process chamber outlet (11). The first gas distribution device (105) is connected to the process chamber inlet (104) through a flat quadrangular first communication device (9), and the second gas distribution device (13) is connected to the process chamber outlet (11) through a flat quadrangular third communication device (12). The device effectively improves the gas distribution uniformity in the process chamber.
Claims19
A slot-die type gas distribution device for photovoltaic manufacturing, comprising a first gas distribution device located at a process chamber inlet, wherein the first gas distribution device is provided with a first inlet and a first outlet, with the first inlet being connected to a gas inlet tube and the first outlet being connected to the process chamber inlet;
- the first outlet is communicated with the process chamber inlet through a first communication device, which is a flat quadrangular hollow box, with two opposite sides of the hollow box being uncovered and used as an inlet and an outlet respectively, and the shapes and sizes of the first outlet, a first communication device inlet, a first communication device outlet and the process chamber inlet are the same;
- wherein with regard to the hollow box, the length is greater than the width, the width is greater than the height, and the two uncovered sides of the hollow box are parallel to the height direction of the hollow box, that is, a hollow box inlet is long and narrow.
Dependencies are inferred from the claim text.