Window for chemical vapor deposition systems and related methods

A chemical vapor deposition system comprising:

• a chamber wall at least partially defining a processing chamber;
• a substrate support positioned within the processing chamber, the substrate support being configured to receive a substrate thereon;
• and
• a window comprising:
• a frame for attaching the window to the chamber wall;
• and
• a transparent body connected to the frame, the body extending between a first face and an opposed second face, the first face being oriented to face toward the substrate support when the frame is attached to the chamber wall, the first face including a radially outer surface and a radially inner surface circumscribed within the outer surface, the outer surface extending radially from the frame to the inner surface and the inner surface extending radially inward from the outer surface to a radial center of the window, the outer surface having a first radius of curvature and the inner surface having a second radius of curvature different from the first radius of curvature, wherein the outer surface and the inner surface are each convex, and wherein the transparent body includes the inner surface and the outer surface.

A method of depositing a layer on a substrate, the method comprising:

• providing a substrate on a substrate support within a processing chamber, the processing chamber including a gas inlet and a gas outlet;
• providing an upper window in the processing chamber, the upper window being transparent to enable radiant heating light to pass through the upper window, the upper window having a first face spaced from the substrate to define an air gap therebetween, the first face including a radially outer surface and a radially inner surface circumscribed within the outer surface, the outer surface having a first radius of curvature and the inner surface having a second radius of curvature different from the first radius of curvature, wherein the outer surface and the inner surface are each convex;
• wherein the upper window includes a transparent body, the transparent body including the inner surface and the outer surface;
• and
• directing a gas flow through the gas inlet, into the air gap between the first face and the substrate, and to and to the gas outlet.