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US 2026/0308758 A1Published application
Heat management systems and methods
AssigneeASM IP Holding B.V.
InventorsRan Li, Hang Zhang, Nirmal Gokuldas Waykole
Life of this patent
Estimating the term…
Abstract
A system is provided including a main cabinet having a process chamber and a gas box disposed therein, first scrubber, disposed outside the main cabinet, in fluid communication with the gas box, a conduit disposed in the main cabinet configured to place an interior of the main cabinet in fluid communication with a fan.
Claims20
A system comprising:
- a main cabinet having a process chamber and a gas box disposed therein;
- a first scrubber, disposed outside the main cabinet, in fluid communication with the gas box;
- and
- a conduit disposed in the main cabinet configured to place an interior of the main cabinet in fluid communication with a fan.
1 more element
A system comprising:
- a main cabinet having a process chamber and a gas box disposed therein;
- a conduit disposed at a base of the main cabinet and configured to place an interior of the main cabinet in fluid communication with a fan;
- a second conduit placing the gas box in fluid communication with the process chamber;
- and
- a pressure sensor in fluid communication with the gas box and configured to determine a pressure inside second conduit.
2 more elements
A method comprising:
- disposing a process chamber and a gas box within a main cabinet;
- disposing a first scrubber outside the main cabinet;
- placing the first scrubber in fluid communication with the gas box;
- placing the main cabinet in fluid communication with a fan via a conduit disposed at a base of the main cabinet.
1 more element
Dependencies are inferred from the claim text.