B81C 2201/0101
Shaping material
Official title: Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
B81C2201/0101 (Shaping material) appears on 2,394 US grants and 2,794 published applications in this corpus.
Search patents in B81C- Granted patents
- 2,394
- Published applications
- 2,794
- Assignees
- 855
- Inventors
- 4,915
- Latest grant
- 6 Oct 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 1 | 0 |
| 1977 | 0 | 0 |
| 1978 | 0 | 0 |
| 1979 | 0 | 0 |
| 1980 | 0 | 0 |
| 1981 | 0 | 0 |
| 1982 | 1 | 0 |
| 1983 | 0 | 0 |
| 1984 | 0 | 0 |
| 1985 | 0 | 0 |
| 1986 | 1 | 0 |
| 1987 | 2 | 0 |
| 1988 | 0 | 0 |
| 1989 | 1 | 0 |
| 1990 | 1 | 0 |
| 1991 | 1 | 0 |
| 1992 | 1 | 0 |
| 1993 | 2 | 0 |
| 1994 | 4 | 0 |
| 1995 | 5 | 0 |
| 1996 | 12 | 0 |
| 1997 | 11 | 0 |
| 1998 | 19 | 0 |
| 1999 | 20 | 0 |
| 2000 | 30 | 0 |
| 2001 | 29 | 16 |
| 2002 | 38 | 61 |
| 2003 | 47 | 72 |
| 2004 | 62 | 83 |
| 2005 | 58 | 81 |
| 2006 | 47 | 88 |
| 2007 | 65 | 73 |
| 2008 | 46 | 77 |
| 2009 | 42 | 99 |
| 2010 | 86 | 92 |
| 2011 | 57 | 81 |
| 2012 | 71 | 96 |
| 2013 | 92 | 107 |
| 2014 | 105 | 123 |
| 2015 | 113 | 114 |
| 2016 | 121 | 187 |
| 2017 | 148 | 200 |
| 2018 | 168 | 145 |
| 2019 | 162 | 138 |
| 2020 | 153 | 140 |
| 2021 | 112 | 152 |
| 2022 | 99 | 121 |
| 2023 | 103 | 121 |
| 2024 | 103 | 122 |
| 2025 | 87 | 109 |
| 2026 | 68 | 96 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
- B81C 2201/0128Processes for removing materialIndexing code1,384
- B81C 2201/0102Surface micromachiningIndexing code537
- B81C 2201/0147Film patterningIndexing code432
- B81C 2201/0111Bulk micromachiningIndexing code293
- B81C 2201/0118Processes for the planarization of structuresIndexing code129
- B81C 2201/0156Lithographic techniquesIndexing code119
- B81C 2201/016PassivationIndexing code72
Recent patents
- Femtosecond laser surface processing for controlled fill and targeted deposition6 Oct 2026US 12,752,371 B1Honeywell Federal Manufacturing & Technologies, LLC
- MEMS structure including a buried cavity with antistiction protuberances, and manufacturing methods thereof6 Oct 2026US 12,753,067 B2STMicroelectronics S,r.l.
- Composite spring structure to reinforce mechanical robustness of a mems device29 Sep 2026US 12,747,153 B2Taiwan Semiconductor Manufacturing Company.Ltd
- Micro-electro-mechanical system and manufacturing method thereof29 Sep 2026US 12,747,154 B2Beijing BOE Technology Development Co., Ltd.
- Method for producing a micromechanical device comprising a cavity having a melt seal29 Sep 2026US 12,747,156 B2Robert Bosch GmbH
- Micromechanical arm array for mems actuators8 Oct 2026US 2026/0307981 A1Taiwan Semiconductor Manufacturing Company.Ltd
- Method for producing a microelectromechanical device comprising a cap structure and a microelectromechanical device8 Oct 2026US 2026/0307983 A1
- Anchor structure1 Oct 2026US 2026/0296876 A1Lawrence Semiconductor Research Laboratory, Inc.
- Micro-electro-mechanical system package and fabrication method thereof1 Oct 2026US 2026/0296879 A1Vanguard International Semiconductor Corporation
- Manufacturing a microphone by bonding layers1 Oct 2026US 2026/0296881 A1InvenSense, Inc.
Most cited
By later US patents
- Method for fabricating a structure for a microelectromechanical systems (MEMS) device722US 6,794,119 B2Iridigm Display Corporation · 2004
- Method of anisotropically etching silicon679US 5,501,893 ARobert Bosch GmbH · 1996
- Method for forming micro cavity560US 6,342,427 B12002
- Method of producing regular arrays of nano-scale objects using nano-structured block-copolymeric materials513US 7,115,305 B2California Institute of Technology · 2006
- Integration of absorption based heating bake methods into a photolithography track system470US 9,613,801 B2Tokyo Electron Limited · 2017