B81
Microstructural technology
B81 (Microstructural technology) appears on 15,524 US grants and 18,265 published applications in this corpus.
Search patents in B81- Granted patents
- 15,524
- Published applications
- 18,265
- Assignees
- 3,265
- Inventors
- 22,365
- Latest grant
- 6 Oct 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 2 | 0 |
| 1977 | 0 | 0 |
| 1978 | 0 | 0 |
| 1979 | 0 | 0 |
| 1980 | 2 | 0 |
| 1981 | 0 | 0 |
| 1982 | 1 | 0 |
| 1983 | 1 | 0 |
| 1984 | 3 | 0 |
| 1985 | 1 | 0 |
| 1986 | 4 | 0 |
| 1987 | 5 | 0 |
| 1988 | 4 | 0 |
| 1989 | 6 | 0 |
| 1990 | 4 | 0 |
| 1991 | 8 | 0 |
| 1992 | 8 | 0 |
| 1993 | 15 | 0 |
| 1994 | 23 | 0 |
| 1995 | 29 | 0 |
| 1996 | 49 | 0 |
| 1997 | 58 | 0 |
| 1998 | 73 | 0 |
| 1999 | 91 | 0 |
| 2000 | 125 | 0 |
| 2001 | 166 | 86 |
| 2002 | 242 | 378 |
| 2003 | 326 | 451 |
| 2004 | 429 | 619 |
| 2005 | 414 | 644 |
| 2006 | 411 | 630 |
| 2007 | 365 | 710 |
| 2008 | 429 | 685 |
| 2009 | 422 | 710 |
| 2010 | 552 | 786 |
| 2011 | 529 | 692 |
| 2012 | 561 | 738 |
| 2013 | 688 | 813 |
| 2014 | 820 | 997 |
| 2015 | 875 | 1025 |
| 2016 | 899 | 956 |
| 2017 | 885 | 929 |
| 2018 | 778 | 933 |
| 2019 | 887 | 895 |
| 2020 | 881 | 892 |
| 2021 | 693 | 825 |
| 2022 | 652 | 754 |
| 2023 | 645 | 641 |
| 2024 | 587 | 571 |
| 2025 | 546 | 547 |
| 2026 | 330 | 358 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subclasses
Granted patents
Recent patents
- Femtosecond laser surface processing for controlled fill and targeted deposition6 Oct 2026US 12,752,371 B1Honeywell Federal Manufacturing & Technologies, LLC
- MEMS structure including a buried cavity with antistiction protuberances, and manufacturing methods thereof6 Oct 2026US 12,753,067 B2STMicroelectronics S,r.l.
- Engineered substrates, free-standing semiconductor microstructures, and related systems and methods6 Oct 2026US 12,753,068 B2Lawrence Semiconductor Research Laboratory, Inc.
- MEMS device6 Oct 2026US 12,753,069 B2Rohm Co., Ltd.
- MEMS resonator6 Oct 2026US 12,753,070 B2SiTime Corporation
- Microelectromechanical systems (mems) actuator with magnetic latching and methods for manufacturing and using the same8 Oct 2026US 2026/0307980 A1Atomic Machines, Inc.
- Micromechanical arm array for mems actuators8 Oct 2026US 2026/0307981 A1Taiwan Semiconductor Manufacturing Company.Ltd
- Packaging method for mems acoustic device structure, mems acoustic device packaging structure and mems chip packaging method for acoustic device8 Oct 2026US 2026/0307982 A1Hefei Smat Technology Co., Ltd.
- Method for producing a microelectromechanical device comprising a cap structure and a microelectromechanical device8 Oct 2026US 2026/0307983 A1
- Capacitive rf microswitch for high-power applications8 Oct 2026US 2026/0311937 A1
Most cited
By later US patents
- Formation of microstamped patterns on surfaces and derivative articles1,049US 5,512,131 APresident and Fellows of Harvard College · 1996
- Microneedle devices and methods of manufacture and use thereof907US 6,334,856 B12002
- Methods and devices for fabricating and assembling printable semiconductor elements883US 7,622,367 B1The Board of Trustees of the University of Illinois · 2009
- Stretchable semiconductor elements and stretchable electrical circuits765US 7,557,367 B2The Board of Trustees of the University of Illinois · 2009
- Method for fabricating a structure for a microelectromechanical systems (MEMS) device722US 6,794,119 B2Iridigm Display Corporation · 2004