Stretchable semiconductor elements and stretchable electrical circuits
AssigneeThe Board of Trustees of the University of Illinois
InventorsJohn A. Rogers, Dahl-Young Khang, Etienne Menard
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Abstract
The invention provides methods and devices for fabricating printable semiconductor elements and assembling printable semiconductor elements onto substrate surfaces. Methods, devices and device components of the present invention are capable of generating a wide range of flexible electronic and optoelectronic devices and arrays of devices on substrates comprising polymeric materials. The present invention also provides stretchable semiconductor structures and stretchable electronic devices capable of good performance in stretched configurations.
Claims61
A stretchable semiconductor element comprising:
- a prestrained elastic substrate having a supporting surface;
- and
- a printable single crystalline semiconductor structure provided in a curved conformation having a curved surface with at least one concave region and at least one convex region, wherein said curved surface is continuously bonded to said supporting surface of said prestrained elastic substrate, said semiconductor structure comprising a bent structure under strain resulting from application of a force arising from the bonding between said curved surface of said semiconductor structure and said supporting surface of the prestrained elastic substrate.
A stretchable electrical circuit comprising:
- a prestrained elastic substrate having a supporting surface;
- and
- an electrical device comprising a plurality of integrated device components;
- said
- electrical device provided in a curved conformation having a curved surface with at least one concave region and at least one convex region, wherein said curved surface is continuously bonded to said supporting surface of said prestrained elastic substrate, said plurality of integrated device components comprising a bent structure under strain resulting from application of a force arising from the bonding between said curved surface of said electrical device and said supporting surface of the prestrained elastic substrate, wherein said plurality of integrated device components includes a single crystalline semiconductor structure provided in said bent structure.
A stretchable electronic device comprising:
- a prestrained elastic substrate having a supporting surface;
- and
- a thin film transistor comprising a plurality of integrated device components including a single crystalline semiconductor structure, an electrode and a dielectric layer;
- said thin film transistor provided in a curved conformation having a curved surface with at least one concave region and at least one convex region, wherein said curved surface is continuously bonded to said supporting surface of said prestrained elastic substrate, said thin film transistor comprising a bent structure under strain resulting from application of a force arising from the bonding between said curved surface of said thin film transistor and said supporting surface of the elastic substrate.
Dependencies are inferred from the claim text.