Microelectromechanical systems (mems) actuator with magnetic latching and methods for manufacturing and using the same

An electromechanical actuator comprising:

• a stator assembly that has a chamber partially defined therethrough along a central longitudinal axis,
• wherein the stator assembly includes
• a trinity of ferromagnetic layers with coils situated therebetween, such that (i) at least one coil is situated between a first ferromagnetic layer and a second ferromagnetic layer of the trinity of ferromagnetic layers and (ii) at least one coil is situated between the second ferromagnetic layer and a third ferromagnetic layer of the trinity of ferromagnetic layers, and
• a first portion of a flexure;
• and
• a plunger assembly that is situated in the chamber of the stator assembly and, in operation, moves along the central longitudinal axis between a first position and a second position,
• wherein the plunger assembly includes
• a plunger that includes a magnet, and
• a second portion of the flexure;
• wherein to move the plunger assembly between the first and second positions, current is applied to the coils;
• and
• wherein movement of the plunger assembly is constrained by the flexure, as the second portion is configured to move with the plunger assembly while the first portion is configured to remain in a fixed position with the stator assembly.