B81B
Microstructural devices or systems
Official title: MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES (piezoelectric, electrostrictive or magnetostrictive elements per se H10N30/00, H10N35/00)
B81B (Microstructural devices or systems) appears on 11,832 US grants and 13,970 published applications in this corpus.
Search patents in B81B- Granted patents
- 11,832
- Published applications
- 13,970
- Assignees
- 2,566
- Inventors
- 16,952
- Latest grant
- 6 Oct 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1980 | 1 | 0 |
| 1981 | 0 | 0 |
| 1982 | 0 | 0 |
| 1983 | 1 | 0 |
| 1984 | 2 | 0 |
| 1985 | 1 | 0 |
| 1986 | 3 | 0 |
| 1987 | 3 | 0 |
| 1988 | 4 | 0 |
| 1989 | 5 | 0 |
| 1990 | 2 | 0 |
| 1991 | 7 | 0 |
| 1992 | 6 | 0 |
| 1993 | 10 | 0 |
| 1994 | 16 | 0 |
| 1995 | 17 | 0 |
| 1996 | 34 | 0 |
| 1997 | 41 | 0 |
| 1998 | 45 | 0 |
| 1999 | 65 | 0 |
| 2000 | 86 | 0 |
| 2001 | 127 | 60 |
| 2002 | 169 | 292 |
| 2003 | 234 | 318 |
| 2004 | 328 | 423 |
| 2005 | 296 | 424 |
| 2006 | 283 | 393 |
| 2007 | 246 | 465 |
| 2008 | 271 | 443 |
| 2009 | 278 | 463 |
| 2010 | 357 | 535 |
| 2011 | 369 | 503 |
| 2012 | 385 | 532 |
| 2013 | 499 | 601 |
| 2014 | 597 | 726 |
| 2015 | 634 | 778 |
| 2016 | 674 | 742 |
| 2017 | 696 | 761 |
| 2018 | 609 | 767 |
| 2019 | 726 | 751 |
| 2020 | 746 | 754 |
| 2021 | 556 | 701 |
| 2022 | 560 | 658 |
| 2023 | 572 | 577 |
| 2024 | 504 | 506 |
| 2025 | 470 | 480 |
| 2026 | 297 | 317 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Main groups
Granted patents with any code in the group
- B81B 2201/00Specific applications of microelectromechanical systemsIndexing code7,763
- B81B 3/00Devices comprising flexible or deformable elements4,669
- B81B 7/00Microstructural systems4,470
- B81B 2203/00Basic microelectromechanical structuresIndexing code4,210
- B81B 2207/00Microstructural systems or auxiliary parts thereofIndexing code2,525
- B81B 1/00Devices without movable or flexible elements429
- B81B 5/00Devices comprising elements which are movable in relation to each other128
Recent patents
- Femtosecond laser surface processing for controlled fill and targeted deposition6 Oct 2026US 12,752,371 B1Honeywell Federal Manufacturing & Technologies, LLC
- MEMS structure including a buried cavity with antistiction protuberances, and manufacturing methods thereof6 Oct 2026US 12,753,067 B2STMicroelectronics S,r.l.
- Engineered substrates, free-standing semiconductor microstructures, and related systems and methods6 Oct 2026US 12,753,068 B2Lawrence Semiconductor Research Laboratory, Inc.
- MEMS device6 Oct 2026US 12,753,069 B2Rohm Co., Ltd.
- Circuit for operating a capacitive sensor and sensor apparatus6 Oct 2026US 12,754,221 B2Robert Bosch GmbH
- Microelectromechanical systems (mems) actuator with magnetic latching and methods for manufacturing and using the same8 Oct 2026US 2026/0307980 A1Atomic Machines, Inc.
- Micromechanical arm array for mems actuators8 Oct 2026US 2026/0307981 A1Taiwan Semiconductor Manufacturing Company.Ltd
- Packaging method for mems acoustic device structure, mems acoustic device packaging structure and mems chip packaging method for acoustic device8 Oct 2026US 2026/0307982 A1Hefei Smat Technology Co., Ltd.
- Method for producing a microelectromechanical device comprising a cap structure and a microelectromechanical device8 Oct 2026US 2026/0307983 A1
- Capacitive rf microswitch for high-power applications8 Oct 2026US 2026/0311937 A1
Most cited
By later US patents
- Formation of microstamped patterns on surfaces and derivative articles1,049US 5,512,131 APresident and Fellows of Harvard College · 1996
- Microneedle devices and methods of manufacture and use thereof907US 6,334,856 B12002
- Method for fabricating a structure for a microelectromechanical systems (MEMS) device722US 6,794,119 B2Iridigm Display Corporation · 2004
- Hermetic seal and method to create the same666US 6,589,625 B1Iridigm Display Corporation · 2003
- Microneedle device for transport of molecules across tissue634US 6,503,231 B1Georgia Tech Research Corporation · 2003