B81B 2201/00
Specific applications of microelectromechanical systems
B81B2201/00 (Specific applications of microelectromechanical systems) appears on 7,763 US grants and 9,321 published applications in this corpus.
Search patents in B81B- Granted patents
- 7,763
- Published applications
- 9,321
- Assignees
- 1,854
- Inventors
- 11,888
- Latest grant
- 6 Oct 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1983 | 1 | 0 |
| 1984 | 2 | 0 |
| 1985 | 0 | 0 |
| 1986 | 3 | 0 |
| 1987 | 1 | 0 |
| 1988 | 2 | 0 |
| 1989 | 3 | 0 |
| 1990 | 1 | 0 |
| 1991 | 4 | 0 |
| 1992 | 5 | 0 |
| 1993 | 6 | 0 |
| 1994 | 13 | 0 |
| 1995 | 13 | 0 |
| 1996 | 23 | 0 |
| 1997 | 19 | 0 |
| 1998 | 29 | 0 |
| 1999 | 31 | 0 |
| 2000 | 38 | 0 |
| 2001 | 72 | 47 |
| 2002 | 92 | 165 |
| 2003 | 138 | 180 |
| 2004 | 195 | 256 |
| 2005 | 173 | 260 |
| 2006 | 174 | 233 |
| 2007 | 160 | 288 |
| 2008 | 168 | 263 |
| 2009 | 161 | 318 |
| 2010 | 222 | 342 |
| 2011 | 229 | 327 |
| 2012 | 257 | 320 |
| 2013 | 284 | 311 |
| 2014 | 369 | 394 |
| 2015 | 349 | 483 |
| 2016 | 429 | 487 |
| 2017 | 421 | 536 |
| 2018 | 410 | 536 |
| 2019 | 503 | 516 |
| 2020 | 524 | 556 |
| 2021 | 403 | 534 |
| 2022 | 407 | 510 |
| 2023 | 441 | 463 |
| 2024 | 383 | 376 |
| 2025 | 372 | 372 |
| 2026 | 233 | 248 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
- B81B 2201/02SensorsIndexing code4,740
- B81B 2201/04Optical memsIndexing code1,452
- B81B 2201/03Microengines and actuatorsIndexing code892
- B81B 2201/05MicrofluidicsIndexing code858
- B81B 2201/01SwitchesIndexing code444
- B81B 2201/06Bio-memsIndexing code57
- B81B 2201/10MicrofiltersIndexing code41
- B81B 2201/12Stm or afm microtipsIndexing code34
Recent patents
- MEMS structure including a buried cavity with antistiction protuberances, and manufacturing methods thereof6 Oct 2026US 12,753,067 B2STMicroelectronics S,r.l.
- MEMS device6 Oct 2026US 12,753,069 B2Rohm Co., Ltd.
- Circuit for operating a capacitive sensor and sensor apparatus6 Oct 2026US 12,754,221 B2Robert Bosch GmbH
- Device, system, method, and computer product for detecting and evaluating environmental quantities and events with modular approach and variable complexity6 Oct 2026US 12,754,529 B2STMicroelectronics S,r.l.
- System and method for generating an audio signal6 Oct 2026US 12,756,970 B2Sonicedge Ltd.
- Microelectromechanical systems (mems) actuator with magnetic latching and methods for manufacturing and using the same8 Oct 2026US 2026/0307980 A1Atomic Machines, Inc.
- Micromechanical arm array for mems actuators8 Oct 2026US 2026/0307981 A1Taiwan Semiconductor Manufacturing Company.Ltd
- Packaging method for mems acoustic device structure, mems acoustic device packaging structure and mems chip packaging method for acoustic device8 Oct 2026US 2026/0307982 A1Hefei Smat Technology Co., Ltd.
- Method for producing a microelectromechanical device comprising a cap structure and a microelectromechanical device8 Oct 2026US 2026/0307983 A1
- Capacitive rf microswitch for high-power applications8 Oct 2026US 2026/0311937 A1
Most cited
By later US patents
- Formation of microstamped patterns on surfaces and derivative articles1,049US 5,512,131 APresident and Fellows of Harvard College · 1996
- Microneedle devices and methods of manufacture and use thereof907US 6,334,856 B12002
- Method for fabricating a structure for a microelectromechanical systems (MEMS) device722US 6,794,119 B2Iridigm Display Corporation · 2004
- Microneedle device for transport of molecules across tissue634US 6,503,231 B1Georgia Tech Research Corporation · 2003
- Microfabricated elastomeric valve and pump systems619US 6,408,878 B1California Institute of Technology · 2002