B81B 2201/04
Optical mems
Official title: Optical MEMS
B81B2201/04 (Optical mems) appears on 1,452 US grants and 1,757 published applications in this corpus.
Search patents in B81B- Granted patents
- 1,452
- Published applications
- 1,757
- Assignees
- 471
- Inventors
- 2,464
- Latest grant
- 8 Sep 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1989 | 1 | 0 |
| 1990 | 0 | 0 |
| 1991 | 0 | 0 |
| 1992 | 1 | 0 |
| 1993 | 1 | 0 |
| 1994 | 2 | 0 |
| 1995 | 3 | 0 |
| 1996 | 3 | 0 |
| 1997 | 3 | 0 |
| 1998 | 3 | 0 |
| 1999 | 4 | 0 |
| 2000 | 5 | 0 |
| 2001 | 17 | 13 |
| 2002 | 25 | 66 |
| 2003 | 46 | 73 |
| 2004 | 82 | 89 |
| 2005 | 69 | 97 |
| 2006 | 65 | 87 |
| 2007 | 52 | 81 |
| 2008 | 60 | 76 |
| 2009 | 64 | 73 |
| 2010 | 67 | 77 |
| 2011 | 52 | 48 |
| 2012 | 56 | 69 |
| 2013 | 47 | 31 |
| 2014 | 50 | 44 |
| 2015 | 36 | 60 |
| 2016 | 50 | 62 |
| 2017 | 43 | 67 |
| 2018 | 49 | 54 |
| 2019 | 47 | 63 |
| 2020 | 78 | 99 |
| 2021 | 47 | 97 |
| 2022 | 52 | 92 |
| 2023 | 79 | 85 |
| 2024 | 92 | 65 |
| 2025 | 69 | 51 |
| 2026 | 32 | 38 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
Recent patents
- Laser marking system and method8 Sep 2026US 12,728,482 B2Silicon Light Machines Corporation
- Movable device, MEMS device and optical scanning apparatus8 Sep 2026US 12,730,301 B2Mitsumi Electric Co., Ltd.
- Micro-electro-mechanical systems and preparation method thereof25 Aug 2026US 12,715,762 B2Huawei Technologies Co., Ltd.
- Device with a stress decoupling structure18 Aug 2026US 12,709,538 B2Infineon Technologies AG
- Methods for fabrication of MEMS device11 Aug 2026US 12,703,624 B2Omnitron Sensors Inc.
- Method for manufacturing a microelectromechanical component, and microelectromechanical component1 Oct 2026US 2026/0296882 A1
- Systems and methods to reduce stiction in mems devices1 Oct 2026US 2026/0299283 A1Texas Instruments Incorporated
- Bonding pillar structure for hidden comb microelectromechanical system17 Sep 2026US 2026/0280449 A1Lumentum Operations LLC
- Three dimensional trace for micro-electromechanical system (mems) devices27 Aug 2026US 2026/0250123 A1Lumentum Operations LLC
- LIDAR systems and methods6 Aug 2026US 2026/0227493 A1Innoviz Technologies Ltd.
Most cited
By later US patents
- Method for fabricating a structure for a microelectromechanical systems (MEMS) device722US 6,794,119 B2Iridigm Display Corporation · 2004
- Spatial light modulator and method555US 5,096,279 ATexas Instruments Incorporated · 1992
- Bistable microelectromechanical actuator511US 5,867,302 ASandia Corporation · 1999
- Multi-layer microfluidic devices394US 6,167,910 ACaliper Technologies Corp. · 2001
- Low reset voltage process for DMD363US 5,331,454 ATexas Instruments Incorporated · 1994