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US 12,709,538 B2Granted
Device with a stress decoupling structure
AssigneeInfineon Technologies AG
InventorsMohammadamir Ghaderi, David Tumpold
Life of this patent
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Abstract
A MEMS device comprises a suspended membrane structure having an inner membrane section and an outer membrane section. The outer membrane section surrounds the inner membrane section. The membrane structure comprises an elastically deformable spring structure in the outer membrane section, such that the spring structure is arranged to convert a thermal-induced compressive stress in the suspended membrane structure into a spring displacement.
Claims20
A micro-electro-mechanical system (MEMS) device comprising:
- a suspended membrane structure having an inner membrane section and an outer membrane section, wherein the outer membrane section at least partially surrounds the inner membrane section;
- and
- a spring structure that is elastically deformable in the outer membrane section, wherein the spring structure is arranged to respond to a thermal-induced compressive stress in the suspended membrane structure with a spring displacement of the spring structure.
A MEMS device comprising:
- a membrane structure having an inner membrane section and an outer membrane section at least partially surrounding the inner membrane section;
- and
- a spring structure formed in the outer membrane section by at least two parallel trenches penetrating the outer membrane section, wherein the spring structure is configured to respond to a thermal stress in the membrane structure with a mechanical deformation between the two parallel trenches.
Dependencies are inferred from the claim text.