B81B 2201/047
Optical mems not provided for in b81b2201/042 - b81b2201/045
Official title: Optical MEMS not provided for in B81B2201/042 - B81B2201/045
B81B2201/047 (Optical mems not provided for in b81b2201/042 - b81b2201/045) appears on 389 US grants and 468 published applications in this corpus.
Search patents in B81B- Granted patents
- 389
- Published applications
- 468
- Assignees
- 203
- Inventors
- 822
- Latest grant
- 8 Sep 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1992 | 1 | 0 |
| 1993 | 1 | 0 |
| 1994 | 1 | 0 |
| 1995 | 0 | 0 |
| 1996 | 1 | 0 |
| 1997 | 0 | 0 |
| 1998 | 0 | 0 |
| 1999 | 0 | 0 |
| 2000 | 2 | 0 |
| 2001 | 4 | 1 |
| 2002 | 3 | 16 |
| 2003 | 11 | 17 |
| 2004 | 18 | 24 |
| 2005 | 13 | 21 |
| 2006 | 19 | 38 |
| 2007 | 13 | 30 |
| 2008 | 29 | 36 |
| 2009 | 29 | 27 |
| 2010 | 30 | 31 |
| 2011 | 20 | 15 |
| 2012 | 20 | 21 |
| 2013 | 16 | 14 |
| 2014 | 13 | 13 |
| 2015 | 13 | 13 |
| 2016 | 11 | 24 |
| 2017 | 11 | 21 |
| 2018 | 14 | 13 |
| 2019 | 10 | 12 |
| 2020 | 21 | 16 |
| 2021 | 10 | 18 |
| 2022 | 6 | 18 |
| 2023 | 15 | 13 |
| 2024 | 23 | 7 |
| 2025 | 6 | 7 |
| 2026 | 5 | 2 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Laser marking system and method8 Sep 2026US 12,728,482 B2Silicon Light Machines Corporation
- Two-layer optical beam steering device, system, method of utilization, and method of fabrication21 Jul 2026US 12,687,714 B2Carillon Technologies Management Corporation
- MEMS optical microphone24 Mar 2026US 12,583,737 B2Aac Acoustic Technologies (Shenzhen) Co., Ltd.
- MEMS packaging with actuator stator providing electrical connection point3 Mar 2026US 12,565,420 B2Connaught Electronics Ltd.
- Generating a MEMS device with glass cover and MEMS device27 Jan 2026US 12,534,360 B2Infineon Technologies AG
- Mems rotating micro actuators9 Jul 2026US 2026/0193078 A1Preciseley Microtechnology Corp.
- Generating a mems device with glass cover and mems device4 Jun 2026US 2026/0152389 A1Infineon Technologies AG
- Monolithic Microelectromechanical Systems Based Spatial Light Modulators Including Ribbon-Type Modulators23 Oct 2025US 2025/0326629 A1Silicon Light Machines Corporation
- Monolithic Microelectromechanical Systems Based Spatial Light Modulators with Two-dimensional Modulators2 Oct 2025US 2025/0304432 A1Silicon Light Machines Corporation
- Microelectromechanical device for image sensor stabilization purposes14 Aug 2025US 2025/0256953 A1STMicroelectronics International N. V.
Most cited
By later US patents
- Spatial light modulator and method555US 5,096,279 ATexas Instruments Incorporated · 1992
- Multi-layer microfluidic devices394US 6,167,910 ACaliper Technologies Corp. · 2001
- Multi-layer microfluidic devices294US 6,321,791 B1Caliper Technologies Corp. · 2001
- Structure of an optical interference display cell261US 6,882,458 B2Prime View International Co., Ltd. · 2005
- Interference display unit138US 6,995,890 B2Prime View International Co., Ltd. · 2006