US 6,995,890 B2 · Interference display unit

Abstract

An interference display unit with a first electrode, a second electrode and posts located between the two electrodes is provided. The characteristic of the interference display unit is that the second electrode's stress is released through a thermal process. The position of the second electrode is shifted and the distance between the first electrode and the second electrode is therefore defined. A method for fabricating the structure described as follow. A first electrode and a sacrificial layer are sequentially formed on a substrate and at least two openings are formed in the first electrode and the sacrificial layer. A supporter is formed in the opening and the supporter may have at least one arm on the top portion of the supporter. A second electrode is formed on the sacrificial layer and the supporter and a thermal process is performed. Finally, The sacrificial layer is removed.

Claims8

Dependent claims

An optical interference display unit, at least comprising:

at least two first electrodes located on the substrate and separated with each other;
at least two second electrodes, wherein each of the second electrodes settled in parallel with and above each of the first electrodes correspondingly;
and
posts located between the first electrodes and the second electrodes to form a first cavity and a second cavity,
wherein thickness of the two second electrodes is different to provide different stress and after treating the second electrodes by a thermal process, a corresponding length of the first cavity and the second cavity is different.

2 more elements

Dependencies are inferred from the claim text.

Interference display unit

Life of this patent

Interference display unit

Life of this patent

Abstract

Claims8