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US 12,534,360 B2Granted
Generating a MEMS device with glass cover and MEMS device
AssigneeInfineon Technologies AG
InventorsAndre Brockmeier, Rafael Janski, Boris Kirillov, Marten Oldsen, Clemens Roessler, Francisco Javier Santos Rodriguez, Sokratis Sgouridis, Kurt Sorschag
Life of this patent
Estimating the term…
Abstract
In a method of generating a microelectromechanical system, MEMS, device, a MEMS substrate including a movable element is provided. A glass cover member including a glass cover is formed by hot embossing. The glass cover member is bonded to the MEMS substrate so as to hermetically seal by the glass cover a cavity in which the movable element is arranged.
Claims25
A method of generating a microelectromechanical system (MEMS) device, the method comprising:
- providing a MEMS substrate comprising a plurality of movable elements;
- heating a glass to a transition temperature of the glass;
- performing hot embossing by utilizing a pre-structured pressing tool to press the heated glass to form a first glass cover member comprising a plurality of first glass covers,
- wherein a surface roughness of the glass cover member is less than 4 nm;
- bonding, during a frontend process occurring prior to pre-assembly of the MEMS device and prior to a process for assembly of a printed circuit board, the first glass cover member to a first side of the MEMS substrate;
- performing hot embossing to form a second glass cover member comprising a plurality of second glass covers;
- and
- bonding, after bonding the first glass cover member to the first side of the MEMS substrate, the second glass cover member to a second side of the MEMS substrate opposite the first side thereof, wherein the first glass cover member and the second glass cover member are bonded to the MEMS substrate so as to hermetically seal by a respective one of the first glass cover and the second glass cover one of a plurality of cavities, wherein one of the plurality of movable elements is arranged in each of the plurality of cavities and, by being arranged in each of the plurality of cavities, is separated from each of the plurality of movable elements from a remaining portion of movable elements of the plurality of movable elements, and wherein the plurality of movable elements comprise a plurality of movable mirrors for a light detection and ranging (LIDAR) application or a plurality of movable parts of an optical gas sensor, of an optical pressure sensor, or of an optical acceleration sensor.
5 more elements
A method of generating a microelectromechanical system (MEMS) device, the method comprising:
- heating a glass to a transition temperature of the glass;
- performing hot embossing by utilizing a pre-structured pressing tool to press the heated glass to form a first glass cover member comprising a plurality of first glass covers,
- wherein a surface roughness of the glass cover member is less than 4 nm;
- bonding, during a frontend process occurring prior to pre-assembly of the MEMS device and prior to a process for assembly of a printed circuit board, the first glass cover member to a first side of a MEMS substrate;
- performing hot embossing to form a second glass cover member comprising a plurality of second glass covers;
- and
- bonding, after bonding the first glass cover member to the first side of the MEMS substrate, the second glass cover member to a second side of the MEMS substrate opposite the first side thereof, wherein the first glass cover member and the second glass cover member are bonded to the MEMS substrate so as to hermetically seal by a respective one of the first glass cover and the second glass cover one of a plurality of cavities, wherein one of a plurality of movable elements is arranged in each of the plurality of cavities and, by being arranged in each of the plurality of cavities, is separated from each of the plurality of movable elements from a remaining portion of movable elements of the plurality of movable elements, and wherein the plurality of movable elements comprise a plurality of movable mirrors for a light detection and ranging (LIDAR) application or a plurality of movable parts of an optical gas sensor, of an optical pressure sensor, or of an optical acceleration sensor.
4 more elements
Dependencies are inferred from the claim text.