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US 2026/0193078 A1Published application
Mems rotating micro actuators
AssigneePreciseley Microtechnology Corp.
InventorsTiansheng Zhou, Lawrence Lam
Life of this patent
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Abstract
A MEMS structure that can amplify displacement of attached blocker in a small form factor is disclosed. The displacement amplification structure comprises two deformable beams that are anchored to either side of a pivoting body with a defined distance. The other ends of the beams are attached to actuators that can generate small translation movement in the opposing direction over a radius and produce torque on the pivoting body and causing it to rotate.
Claims15
A MEMS rotating actuator comprising:
- a substrate;
- at least one actuator coupled to the substrate by at least a first actuator anchor point and a second actuator anchor point;
- a pivoting body;
- a first extension arm coupled at a first end thereof to the pivoting body at a first location on the pivoting body, and coupled at a second end thereof to the at least one actuator;
- a second extension arm coupled at a first end thereof to the pivoting body at a second location on the pivoting body, and coupled at a second end thereof to a third actuator anchor point;
- and
- an optical element coupled to the pivoting body;
- wherein movement of the at least one actuator causes the pivoting body to rotate, thereby moving the optical element.
5 more elements
A MEMS shutter comprising:
- a substrate;
- a pivoting body;
- an electro-thermal actuator comprising a first actuator and a second actuator, the first actuator coupled to the substrate by at least a first actuator anchor point and a second actuator anchor point, and the second actuator coupled to the substrate at a first end of the second actuator by a third actuator anchor point and at a second end of the second actuator by a fourth actuator anchor point;
- a first extension arm coupled at a first end thereof to the pivoting body at a first anchor point on the pivoting body, and coupled at a second end thereof to the first actuator;
- a second extension arm coupled at a first end thereof to the pivoting body at a second anchor point on the pivoting body, and coupled at a second end thereof to the second actuator;
- the first extension arm and the second extension arm positioned on opposite sides of the pivoting body, the first anchor point and the second anchor point being opposite each other on the pivoting body;
- an optical element coupled to the pivoting body, the optical element being one of a shutter, a blocker, a variable attenuator, a prism, a lens, or a polarizer;
- wherein movement of the first actuator and the second actuator causes the pivoting body to rotate, thereby moving the optical element;
- and
- a top layer having an optical aperture positioned relative to the shutter such that when the shutter is in a closed position, it is located between the optical element and the substrate, and when the shutter is in an open position the shutter is clear of the optical aperture.
7 more elements
A MEMS shutter comprising:
- a substrate;
- a pivoting body;
- an electro-thermal actuator comprising a first actuator and a second actuator, the first actuator coupled to the substrate by at least a first actuator anchor point and a second actuator anchor point, and the second actuator coupled to the substrate at a first end of the second actuator by a third actuator anchor point and at a second end of the second actuator by a fourth actuator anchor point;
- a first extension arm coupled at a first end thereof to the pivoting body at a first anchor point on the pivoting body, and coupled at a second end thereof to the first actuator;
- a second extension arm coupled at a first end thereof to the pivoting body at a second anchor point on the pivoting body, and coupled at a second end thereof to the second actuator;
- the first extension arm and the second extension arm positioned on opposite sides of the pivoting body, the first anchor point and the second anchor point being opposite each other on the pivoting body;
- a shutter coupled to the pivoting body;
- wherein movement of the first actuator and the second actuator causes the pivoting body to rotate, thereby moving the shutter;
- and
- a top layer having an optical aperture positioned relative to the shutter such that when the shutter is in a closed position, the shutter is located between the optical aperture and the substrate, and when the shutter is in an open position, the shutter is clear of the optical aperture;
- wherein the optical aperture is one of a slit, port, group of ports, pin hole, fiber connecting port, or fiducial.
8 more elements
Dependencies are inferred from the claim text.