Generating a mems device with glass cover and mems device
AssigneeInfineon Technologies AG
InventorsAndré BROCKMEIER, Rafael JANSKI, Boris KIRILLOV, Marten OLDSEN, Clemens ROESSLER, Francisco Javier SANTOS RODRIGUEZ, Sokratis SGOURIDIS, Kurt SORSCHAG
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Abstract
In a method of generating a microelectromechanical system, MEMS, device, a MEMS substrate including a movable element is provided. A glass cover member including a glass cover is formed by hot embossing. The glass cover member is bonded to the MEMS substrate so as to hermetically seal by the glass cover a cavity in which the movable element is arranged.
Claims20
A microelectromechanical system (MEMS) device, comprising:
- a MEMS substrate comprising a movable element;
- and
- a first hot embossed glass cover,
- wherein the first hot embossed glass cover is bonded to the MEMS substrate so that a cavity in which the movable element is arranged is hermetically sealed.
An optical microelectromechanical system (MEMS) device, comprising:
- a MEMS substrate comprising a movable element, the movable element being a movable mirror or a movable part of an optical gas sensor, of an optical pressure sensor, or of an optical acceleration sensor;
- a first hot embossed glass cover bonded to a first side of the MEMS substrate;
- and
- a second glass cover bonded to a second side of the MEMS substrate opposite the first side,
- wherein the first hot embossed glass cover is bonded to the MEMS substrate so that the movable element is sealed in a cavity.
A microelectromechanical system (MEMS) wafer, comprising:
- a MEMS substrate comprising a plurality of movable elements;
- a first hot embossed glass cover member comprising a plurality of first glass covers;
- and
- a second hot embossed glass cover member comprising a plurality of second glass covers,
- wherein the first hot embossed glass cover member and the second hot embossed glass cover member are bonded to the MEMS substrate to hermetically seal, by respective ones of the plurality of first glass covers and respective ones of the plurality of second glass covers, a plurality of cavities, and
- wherein one of the plurality of movable elements is arranged in each cavity of the plurality of cavities.
Dependencies are inferred from the claim text.