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US 12,730,301 B2Granted
Movable device, MEMS device and optical scanning apparatus
AssigneeMitsumi Electric Co., Ltd.
InventorTomohiro Taira
Life of this patent
Estimating the term…
Abstract
A movable device includes a movable portion and a drive structure configured to drive the movable portion. The movable device includes a support frame that surrounds the movable portion and supports the drive structure. The movable device includes electrodes electrically coupled to the drive structure. The movable device includes pseudo electrodes electrically isolated from the drive structure. The electrodes and the pseudo electrodes are provided on the support frame.
Claims15
A movable device comprising:
- a movable portion;
- a drive structure configured to drive the movable portion;
- a support frame that surrounds the movable portion and supports the drive structure;
- electrodes electrically coupled to the drive structure;
- pseudo electrodes electrically isolated from the drive structure,
- wherein the electrodes and the pseudo electrodes are provided on the support frame, and
- wherein all of the pseudo electrodes are fixed in contact with at least one testing probe.
4 more elements
A microelectromechanical systems (MEMS) device comprising:
- a movable portion;
- a drive structure configured to drive the movable portion;
- a support frame that surrounds the movable portion and supports the drive structure;
- electrodes electrically coupled to the drive structure;
- and
- pseudo electrodes electrically isolated from the drive structure,
- wherein the electrodes and the pseudo electrodes are provided on the support frame, and
- wherein all of the pseudo electrodes are fixed in contact with at least one testing probe.
5 more elements
Dependencies are inferred from the claim text.