B81B 2201/042
Micromirrors, not used as optical switches
B81B2201/042 (Micromirrors, not used as optical switches) appears on 879 US grants and 1,088 published applications in this corpus.
Search patents in B81B- Granted patents
- 879
- Published applications
- 1,088
- Assignees
- 310
- Inventors
- 1,538
- Latest grant
- 8 Sep 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1989 | 1 | 0 |
| 1990 | 0 | 0 |
| 1991 | 0 | 0 |
| 1992 | 0 | 0 |
| 1993 | 0 | 0 |
| 1994 | 1 | 0 |
| 1995 | 3 | 0 |
| 1996 | 2 | 0 |
| 1997 | 3 | 0 |
| 1998 | 3 | 0 |
| 1999 | 2 | 0 |
| 2000 | 2 | 0 |
| 2001 | 10 | 6 |
| 2002 | 13 | 29 |
| 2003 | 21 | 33 |
| 2004 | 40 | 48 |
| 2005 | 44 | 66 |
| 2006 | 33 | 36 |
| 2007 | 33 | 45 |
| 2008 | 27 | 34 |
| 2009 | 27 | 37 |
| 2010 | 30 | 43 |
| 2011 | 23 | 31 |
| 2012 | 34 | 41 |
| 2013 | 27 | 16 |
| 2014 | 34 | 27 |
| 2015 | 16 | 43 |
| 2016 | 36 | 33 |
| 2017 | 28 | 41 |
| 2018 | 32 | 39 |
| 2019 | 36 | 46 |
| 2020 | 48 | 73 |
| 2021 | 35 | 71 |
| 2022 | 38 | 62 |
| 2023 | 51 | 62 |
| 2024 | 61 | 49 |
| 2025 | 57 | 42 |
| 2026 | 28 | 35 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Movable device, MEMS device and optical scanning apparatus8 Sep 2026US 12,730,301 B2Mitsumi Electric Co., Ltd.
- Micro-electro-mechanical systems and preparation method thereof25 Aug 2026US 12,715,762 B2Huawei Technologies Co., Ltd.
- Device with a stress decoupling structure18 Aug 2026US 12,709,538 B2Infineon Technologies AG
- Methods for fabrication of MEMS device11 Aug 2026US 12,703,624 B2Omnitron Sensors Inc.
- MEMS actuator, MEMS actuator drive method, and MEMS actuator control program4 Aug 2026US 12,699,262 B2Hamamatsu Photonics K.K.
- Method for manufacturing a microelectromechanical component, and microelectromechanical component1 Oct 2026US 2026/0296882 A1
- Systems and methods to reduce stiction in mems devices1 Oct 2026US 2026/0299283 A1Texas Instruments Incorporated
- Bonding pillar structure for hidden comb microelectromechanical system17 Sep 2026US 2026/0280449 A1Lumentum Operations LLC
- Three dimensional trace for micro-electromechanical system (mems) devices27 Aug 2026US 2026/0250123 A1Lumentum Operations LLC
- Surface-cured acid anhydride epoxies23 Jul 2026US 2026/0215329 A1Texas Instruments Incorporated
Most cited
By later US patents
- Method for fabricating a structure for a microelectromechanical systems (MEMS) device722US 6,794,119 B2Iridigm Display Corporation · 2004
- Low reset voltage process for DMD363US 5,331,454 ATexas Instruments Incorporated · 1994
- Support post architecture for micromechanical devices340US 6,447,126 B1Texas Instruments Incorporated · 2002
- Support post architecture for micromechanical devices283US 5,650,881 ATexas Instruments Incorporated · 1997
- Method of producing micromechanical devices273US 5,411,769 ATexas Instruments Incorporated · 1995