Systems and methods to reduce stiction in mems devices

A digital micromirror device (DMD) comprising:

• a substrate;
• and
• an array of micromirror assemblies on the substrate, each micromirror assembly including:
• a mirror structure including a mirror plate and a mirror post coupled to the mirror plate;
• and
• a hinge assembly coupled to the mirror post to enable the mirror plate to tilt about a rotational axis, the hinge assembly including:
• a via defined by a portion of a primary layer and at least one additional layer on the portion of the primary layer, the primary layer including a conductive arm outside of the via extending laterally from an opening of the via.

A method of manufacturing a microelectromechanical system (MEMS) device, the method comprising:

• forming a sacrificial layer on a substrate;
• forming an opening in the sacrificial layer;
• depositing, in-situ, without ambient air exposure, a first conductive layer and a second conductive layer sequentially, in which the first conductive layer extends into the opening and the second conductive layer is formed directly on the first conductive layer within the opening such that no native oxide forms between the first conductive layer and the second conductive layer;
• selectively removing the second conductive layer from outside the opening while retaining the second conductive layer within the opening;
• patterning the first conductive layer outside the opening to define at least one of a hinge, a spring tip, or an electrode.