Methods for fabrication of MEMS device
AssigneeOmnitron Sensors Inc.
InventorTrent Huang
Life of this patent
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Abstract
A system and method for fabricating a micro-electromechanical system (MEMS) device is disclosed. A device layer, a handle layer and a buried oxide layer between the handle layer and the device wafer are formed. A top trench is created in a top surface of the device layer. An oxide layer is created over the top surface of the device layer and the top trench. The top of the device layer and the top trench is coated with a polysilicon layer. The oxide layer of the top trench or the top of the device layer is selectively etched away to create a structure. A bottom trench is created through the handle layer under the structure.
Claims20
A method of fabricating a micro-electromechanical systems (MEMS) device, comprising:
- providing a device layer, a handle layer, and a buried oxide layer between the handle layer and the device wafer;
- creating a top trench in a top surface of the device layer;
- creating an oxide layer over the top surface of the device layer and the top trench;
- coating the top of the device layer and the top trench with a first polysilicon layer;
- etching away the oxide layer of the top trench or the top of the device layer to create a structure;
- and
- creating a bottom trench through the handle layer under the created structure.
A method of fabricating a micro-electromechanical systems (MEMS) comb actuator comprising:
- etching an isolation trench in a substrate layer;
- etching a plurality of finger defining trenches in the substrate layer, wherein the plurality of finger defining trenches are perpendicular to the isolation trench;
- growing an oxide layer to fill the isolation trench and coat the sides of the finger defining trenches;
- growing a polysilicon layer to fill the finger defining trenches;
- and
- removing the oxide layer coating the sides of the finger defining trenches and the isolation trench to create a plurality of polysilicon fingers separated by a gap from a plurality of fingers of the substrate layer.
Dependencies are inferred from the claim text.