B81B 2201/03
Microengines and actuators
B81B2201/03 (Microengines and actuators) appears on 892 US grants and 1,032 published applications in this corpus.
Search patents in B81B- Granted patents
- 892
- Published applications
- 1,032
- Assignees
- 407
- Inventors
- 1,757
- Latest grant
- 15 Sep 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1988 | 1 | 0 |
| 1989 | 0 | 0 |
| 1990 | 0 | 0 |
| 1991 | 1 | 0 |
| 1992 | 0 | 0 |
| 1993 | 2 | 0 |
| 1994 | 5 | 0 |
| 1995 | 2 | 0 |
| 1996 | 2 | 0 |
| 1997 | 1 | 0 |
| 1998 | 3 | 0 |
| 1999 | 5 | 0 |
| 2000 | 8 | 0 |
| 2001 | 19 | 15 |
| 2002 | 20 | 29 |
| 2003 | 24 | 27 |
| 2004 | 34 | 32 |
| 2005 | 15 | 31 |
| 2006 | 29 | 21 |
| 2007 | 19 | 36 |
| 2008 | 20 | 40 |
| 2009 | 21 | 30 |
| 2010 | 28 | 42 |
| 2011 | 26 | 27 |
| 2012 | 24 | 31 |
| 2013 | 30 | 29 |
| 2014 | 44 | 24 |
| 2015 | 29 | 42 |
| 2016 | 30 | 34 |
| 2017 | 26 | 42 |
| 2018 | 27 | 41 |
| 2019 | 50 | 64 |
| 2020 | 44 | 66 |
| 2021 | 53 | 75 |
| 2022 | 46 | 57 |
| 2023 | 65 | 68 |
| 2024 | 58 | 50 |
| 2025 | 47 | 51 |
| 2026 | 34 | 28 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
- B81B 2201/033Comb drivesIndexing code253
- B81B 2201/032Bimorph and unimorph actuatorsIndexing code226
- B81B 2201/038Microengines and actuators not provided for in b81b2201/031 - b81b2201/037Indexing code145
- B81B 2201/036MicropumpsIndexing code90
- B81B 2201/031Thermal actuatorsIndexing code78
- B81B 2201/035MicrogearsIndexing code64
- B81B 2201/034Electrical rotating micromachinesIndexing code59
- B81B 2201/037MicrotransmissionsIndexing code28
Recent patents
- Battery cell and battery device having the same15 Sep 2026US 12,738,590 B2SK On Co., Ltd.
- Micromechanical arm array for mems actuators8 Sep 2026US 12,729,109 B2Taiwan Semiconductor Manufacturing Company.Ltd
- MEMS device with integrated CMOS circuit8 Sep 2026US 12,729,111 B23C Project Management Limited
- Micro-electro-mechanical systems and preparation method thereof25 Aug 2026US 12,715,762 B2Huawei Technologies Co., Ltd.
- Resonance device with anti-diffusion layer and resonance device manufacturing method25 Aug 2026US 12,719,443 B2Murata Manufacturing Co., Ltd.
- Microelectromechanical systems (mems) actuator with magnetic latching and methods for manufacturing and using the same8 Oct 2026US 2026/0307980 A1Atomic Machines, Inc.
- Micromechanical arm array for mems actuators8 Oct 2026US 2026/0307981 A1Taiwan Semiconductor Manufacturing Company.Ltd
- Bonding pillar structure for hidden comb microelectromechanical system17 Sep 2026US 2026/0280449 A1Lumentum Operations LLC
- Device and method for manufacturing solid fuel microthrusters using only pcb-mems technology10 Sep 2026US 2026/0264889 A1Universidad de Sevilla
- Method for producing a mems converter using a stretching of an actuator material27 Aug 2026US 2026/0255880 A1Hahn-Schickard-Gesellschaft FüR Angewandte Forschung E. V.
Most cited
By later US patents
- Microfabricated elastomeric valve and pump systems619US 6,408,878 B1California Institute of Technology · 2002
- Laterally driven resonant microstructures419US 5,025,346 AThe Regents of the University of California · 1991
- Method of making a microfabricated elastomeric valve294US 6,793,753 B2California Institute of Technology · 2004
- Systems with high density packing of micromachines215US 6,600,201 B2Hewlett-Packard Development Company, L. P. · 2003
- Micropump with valve structure206US 5,259,737 ASeiko Epson Corporation · 1993