B81B 2201/038
Microengines and actuators not provided for in b81b2201/031 - b81b2201/037
Official title: Microengines and actuators not provided for in B81B2201/031 - B81B2201/037
B81B2201/038 (Microengines and actuators not provided for in b81b2201/031 - b81b2201/037) appears on 145 US grants and 174 published applications in this corpus.
Search patents in B81B- Granted patents
- 145
- Published applications
- 174
- Assignees
- 101
- Inventors
- 364
- Latest grant
- 18 Aug 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 2001 | 5 | 1 |
| 2002 | 4 | 9 |
| 2003 | 5 | 5 |
| 2004 | 4 | 9 |
| 2005 | 5 | 6 |
| 2006 | 6 | 4 |
| 2007 | 6 | 13 |
| 2008 | 5 | 8 |
| 2009 | 8 | 9 |
| 2010 | 7 | 10 |
| 2011 | 5 | 4 |
| 2012 | 4 | 8 |
| 2013 | 9 | 6 |
| 2014 | 7 | 7 |
| 2015 | 6 | 9 |
| 2016 | 9 | 7 |
| 2017 | 2 | 5 |
| 2018 | 5 | 2 |
| 2019 | 7 | 12 |
| 2020 | 2 | 2 |
| 2021 | 11 | 6 |
| 2022 | 2 | 9 |
| 2023 | 6 | 8 |
| 2024 | 3 | 6 |
| 2025 | 7 | 5 |
| 2026 | 5 | 4 |
By publication year. 2026 runs to 8 Oct.
Recent patents
- Cylindrical mems structures for audio components18 Aug 2026US 12,713,185 B2Apple Inc.
- Atomic-smooth device with microstructure, and method for preparing same7 Jul 2026US 12,673,866 B2
- Microelectromechanical drive for moving objects16 Jun 2026US 12,655,015 B2Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e. V.
- MEMS packaging with actuator stator providing electrical connection point3 Mar 2026US 12,565,420 B2Connaught Electronics Ltd.
- MEMS packaging enabling vertical displacement of sensor and actuator rotor17 Feb 2026US 12,552,663 B2Connaught Electronics Ltd.
- Microelectromechanical systems (mems) actuator with magnetic latching and methods for manufacturing and using the same8 Oct 2026US 2026/0307980 A1Atomic Machines, Inc.
- Device and method for manufacturing solid fuel microthrusters using only pcb-mems technology10 Sep 2026US 2026/0264889 A1Universidad de Sevilla
- Method for producing a micromechanical layer structure with high aspect ratio and micromechanical layer structure21 May 2026US 2026/0138867 A1
- Method and apparatus for evaluating electrostatic or nonlinear devices5 Feb 2026US 2026/0035235 A1The Board of Trustees of the Leland Stanford Junior University
- Micromechanical arm array for mems actuators23 Oct 2025US 2025/0326630 A1Taiwan Semiconductor Manufacturing Company.Ltd
Most cited
By later US patents
- Systems with high density packing of micromachines215US 6,600,201 B2Hewlett-Packard Development Company, L. P. · 2003
- MEMS variable optical attenuator108US 6,275,320 B1JDS Uniphase Corporation · 2001
- Vertical displacement device95US 6,940,630 B2University of Florida Research Foundation, Inc. · 2005
- Method for fabricating a multi-layer capacitor and a multi-layer capacitor85US 8,861,184 B2Max-Planck-Gesellschaft Zur FöRderung Der Wissenschaften E. V. · 2014
- Precision electrostatic actuation and positioning69US 6,329,738 B1Massachusetts Institute of Technology · 2001