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US 6,940,630 B2Granted
Vertical displacement device
AssigneeUniversity of Florida Research Foundation, Inc.
InventorHuikai Xie
Life of this patent
Estimating the term…
Abstract
A MEMS vertical displacement device capable of moving one or more vertically displaceable platforms relative to a base. In particular, the vertical displacement device may be capable of moving a vertically displaceable platform so that the vertically displaceable platform remains generally parallel to a base. The vertically displaceable platform may be, but is not limited to, a microlens, a micromirror, micro-grating, or other device. The vertical displacement device may also be included in optical coherence and confocal imaging systems.
Claims15
A MEMS vertical displacement device, comprising:
- an anchor;
- at first frame rotatable about the anchor and having a first side and a second side opposing the first side;
- at least one first actuator coupled to the first side of the first frame and to the anchor enabling the first frame to rotate about the anchor;
- at least one vertically displaceable platform rotatable about the second side of the first frame;
- and
- at least one second actuator coupled to the second side of the first frame and to the at least one vertically displaceable platform enabling the at least one vertically displaceable platform to rotate about the second side of the first frame.
3 more elements
Dependencies are inferred from the claim text.