Microelectromechanical drive for moving objects

A microelectromechanical drive for moving an object, comprising electrostatic bending actuators,

• wherein each electrostatic bending actuator comprises a cantilever comprising at least one active element which comprises a layer stack forming at least one capacitor positioned offset to a center-of-gravity-plane of the cantilever which leads alongside a longitudinal axis of the cantilever from a supported end of the cantilever to a loose end, which is averted from the supported end of the cantilever and which comprises a contact area for engaging with the object,
• wherein each electrostatic bending actuator comprises a cantilever comprising:
• at least one first active element which comprises a first layer stack forming a first capacitor positioned offset to a center-of-gravity-plane of the cantilever, which leads alongside a longitudinal axis of the cantilever from a supported end of the cantilever to the loose end of the cantilever, which comprises a contact area for engaging with the object, and a second capacitor positioned offset to the center-of-gravity-plane so that the center-of-gravity-plane is arranged between the first and second capacitors, and
• at least one second active element which comprises a second layer stack forming a third capacitor positioned offset to the center-of-gravity-plane and a fourth capacitor positioned offset to the center-of-gravity-plane so that the center-of-gravity-plane is arranged between the first and third capacitor on the one hand and the second and fourth capacitors on the other hand,
• wherein the at least one first and the at least one second active element are mutually offset along the longitudinal axis of the cantilever, and
• wherein the at least one first and the at least one second element are actuatable to bend with opposing curvatures so that the cantilever bends towards opposite sides of the center-of-gravity-plane within the at least one first element on the one hand and the at least one second element on the other hand;
• wherein the supported end of the cantilever is held in a guided bearing which allows for displacement in direction of a longitudinal axis of the cantilever.