B81B 2201/031
Thermal actuators
B81B2201/031 (Thermal actuators) appears on 78 US grants and 59 published applications in this corpus.
Search patents in B81B- Granted patents
- 78
- Published applications
- 59
- Assignees
- 59
- Inventors
- 136
- Latest grant
- 11 Nov 2025
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1999 | 3 | 0 |
| 2000 | 4 | 0 |
| 2001 | 6 | 2 |
| 2002 | 6 | 4 |
| 2003 | 6 | 6 |
| 2004 | 6 | 2 |
| 2005 | 3 | 2 |
| 2006 | 0 | 0 |
| 2007 | 1 | 0 |
| 2008 | 1 | 3 |
| 2009 | 0 | 4 |
| 2010 | 4 | 3 |
| 2011 | 1 | 2 |
| 2012 | 5 | 1 |
| 2013 | 0 | 2 |
| 2014 | 2 | 2 |
| 2015 | 2 | 2 |
| 2016 | 2 | 2 |
| 2017 | 4 | 2 |
| 2018 | 1 | 6 |
| 2019 | 2 | 4 |
| 2020 | 5 | 3 |
| 2021 | 4 | 3 |
| 2022 | 4 | 1 |
| 2023 | 2 | 3 |
| 2024 | 3 | 0 |
| 2025 | 1 | 0 |
By publication year. Applications have been published since 2001.
Recent patents
- Mems platform for thin film nanomechanics characterization11 Nov 2025US 12,469,673 B2Carnegie Mellon University
- Integrated circuit packages having stress-relieving features17 Sep 2024US 12,091,310 B2Apogee Semiconductor, Inc.
- MEMS nanotube based thermal neutron detector28 May 2024US 11,994,635 B2The Government of the United States of America, as represented by the Secretary of the Navy
- MEMS device manufacturing method, MEMS device, and shutter apparatus using the same19 Mar 2024US 11,932,535 B2Sumitomo Precision Products Co., Ltd.
- Multidirectional translating and tilting platform using bending actuators as active entity11 Jul 2023US 11,697,584 B2Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e. V.
- Micro-electromechanical system (mems) including tantalum as a structural material31 Aug 2023US 2023/0271822 A1Carnegie Mellon University
- Mems platform for thin film nanomechanics characterization15 Jun 2023US 2023/0187167 A1Carnegie Mellon University
- Bend inducible self-folding origami flexures and microsystems16 Feb 2023US 2023/0048543 A1Lawrence Livermore National Security, LLC
- Light responsive polymer magnetic microrobots3 Feb 2022US 2022/0038035 A1Purdue Research Foundation
- Integrated circuit packages having stress-relieving features2 Dec 2021US 2021/0371271 A1TallannQuest LLC DBA Apogee Semiconductor
Most cited
By later US patents
- Thermal arched beam microelectromechanical switching array171US 5,955,817 AMcnc · 1999
- Thermal arched beam microelectromechanical actuators129US 5,909,078 AMcnc · 1999
- Multi-directional thermal actuator129US 6,438,954 B13M Innovative Properties Company · 2002
- Thermal arched beam microelectromechanical devices and associated fabrication methods116US 5,994,816 AMcnc · 1999
- In-plane MEMS thermal actuator and associated fabrication methods114US 6,211,598 B1JDS Uniphase Corporation · 2001