Back to results
US 12,469,673 B2Granted
Mems platform for thin film nanomechanics characterization
AssigneeCarnegie Mellon University
InventorsMaarten de Boer, Longchang Ni
Life of this patent
Estimating the term…
Abstract
A micro-electromechanical system (MEMS) device includes a silicon substrate; and a Tantalum (Ta) layer comprising a first portion and a second portion, a first portion being suspended over the silicon substrate and configured to move relative to the silicon substrate, and the second portion of the structure being coupled to the silicon substrate and fixed in place relative to the silicon substrate.
Claims20
A micro-electromechanical system (MEMS) test platform, comprising:
- a substrate;
- a Tantalum (Ta) layer comprising a movable structure and a fixed portion, the movable structure being suspended over the substrate and configured to move relative to the substrate, and the fixed portion of the Ta layer being coupled to the substrate and fixed in place relative to the substrate;
- and
- a test specimen comprising a first portion coupled to the movable structure and a second portion coupled to the fixed portion of the Ta layer, the movable structure configured apply a force to the test specimen when a shuttle of the Ta layer structure moves relative to the substrate.
1 more element
Dependencies are inferred from the claim text.