Thermal arched beam microelectromechanical actuators

A microelectromechanical structure comprising:

• a microelectronic substrate;
• spaced apart supports on the microelectronic substrate;
• an arched beam which extends between the spaced apart supports and which expands upon application of heat thereto;
• means for applying heat to the arched beam to cause further arching of the beam as a result of thermal expansion thereof, to thereby cause displacement of the arched beam;
• a first capacitor plate;
• and
• a second capacitor plate which is spaced apart from the first capacitor plate and which is mechanically coupled to the arched beam, such that further displacement of the arched beam causes displacement of the second capacitor plate.

A microelectromechanical structure comprising:

• a microelectronic substrate;
• spaced apart supports on the microelectronic substrate;
• an arched beam which extends between the spaced apart supports and which expands upon application of heat thereto;
• means for applying heat to the arched beam to cause further arching of the beam as a result of thermal expansion thereof, to thereby cause displacement of the arched beam;
• a valve body including a valve opening therein;
• and
• a valve plate which is mechanically coupled to the arched beam, such that displacement of the beam causes movement of the valve plate relative to the valve opening, to thereby provide a microvalve.

A microelectromechanical structure comprising:

• a microelectronic substrate;
• spaced apart supports on the microelectronic substrate;
• a plurality of arched beams which extend in parallel between the spaced apart supports, which are arched in a predetermined direction, and which expand upon application of heat thereto;
• a coupler which mechanically couples the plurality of arched beams between the spaced apart supports;
• and
• a heater disposed on the microelectronic substrate so as to underlie said plurality of arched beams and to be spaced apart from said plurality of arched beams, said heater adapted to heat the ambient surrounding at least one of the arched beams which, in turn, heats the at least one of the arched beams to cause further arching of the at least one arched beams as a result of thermal expansion thereof, to thereby cause displacement of the coupler along the predetermined direction.

A microelectromechanical structure comprising:

• a microelectronic substrate;
• spaced apart supports on the microelectronic substrate;
• at least one arched beam which extends between opposed end portions that are attached to respective ones of the spaced apart supports, which is arched in a predetermined direction, and which expands upon application of heat thereto so as to further arch in the predetermined direction;
• at least one compensating arched beam which extends between opposed end portions that are attached to respective ones of the spaced apart supports, said at least one compensating arched beam being arched in a second direction which is opposite the predetermined direction such that a concave surface of said at least one arched beam faces a concave surface of said at least one compensating arched beam, said at least one compensating arched beam adapted to expand upon application of heat thereto so as to further arch in the second direction such that medial portions of said at least one compensating arched beam are spaced further apart from medial portions of said at least one arched beam;
• a coupler which mechanically couples medial portions of the at least one arched beam and said at least one compensating arched beam at a point between the spaced apart supports;
• and
• means for applying heat to said at least one arched beam to cause further arching of the at least one arched beam as a result of thermal expansion thereof, to thereby cause displacement of the coupler along the predetermined direction.

A microelectromechanical structure comprising:

• a microelectronic substrate;
• spaced apart supports on the microelectronic substrate;
• at least one arched beam which extends between the spaced apart supports, which is arched in a predetermined direction, and which expands upon application of heat thereto;
• at least one neutral beam which is not arched and which extends between the spaced apart supports;
• a coupler which mechanically couples the at least one arched beam and the at least one neutral beam;
• and
• means for applying heat to the at least one arched beam to cause further arching of the at least one arched beam as a result of thermal expansion thereof, to thereby cause displacement of the coupler along the predetermined direction.