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US 11,994,635 B2Granted
MEMS nanotube based thermal neutron detector
AssigneeThe Government of the United States of America, as represented by the Secretary of the Navy
InventorsZishan Hameed, John Gats, Jin-Woo Han, Meyya Meyyappan
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Abstract
A MEMS nanotube based radiation sensor that is low cost, low power, compact, reliable and is applicable across many fields and a method for fabricating such a sensor are described. Each sensor may be connected to an array of similar but distinct sensors that leverage different materials and nanotube technology to detect radiation.
Claims11
A detector system, comprising:
- a first sensor that is disposable, the first sensor comprising:
- a first electrode;
- a second electrode;
- and
- a nanotube layer deposited on the first electrode and the second electrode, the nanotube layer comprising a first nanotube type configured to provide an electrical pathway between the first electrode, and a second nanotube type configured to detect a first type of radiation;
- and
- a second sensor configured to detect a second type of radiation that is different from the first type of radiation, wherein the second sensor is disposable.
4 more elements
A radiation detector system, comprising:
- a first sensor configured to detect a first type of radiation, the first sensor comprising
- a first electrode,
- a second electrode, and
- a nanotube layer deposited on the first electrode and the second electrode,
- wherein the first sensor is disposable;
- a processing unit communicatively coupled to the first sensor, the processing unit configured to receive data from the sensor and determine radiation information based on the received data;
- and
- a second sensor configured to detect a second type of radiation that is different from the first type of radiation, wherein the second sensor is disposable.
5 more elements
Dependencies are inferred from the claim text.