Multi-directional thermal actuator
Assignee3M Innovative Properties Company
InventorsDouglas P. Goetz, Mike E. Hamerly, Daniel B. Pendergrass, Robert G. Smith, Silva K. Theiss, Billy L. Weaver
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Assignee3M Innovative Properties Company
InventorsDouglas P. Goetz, Mike E. Hamerly, Daniel B. Pendergrass, Robert G. Smith, Silva K. Theiss, Billy L. Weaver
Estimating the term…
A micrometer sized multi-directional thermal actuator capable of repeatable and rapid displacement in a substantially horizontal direction, a substantially vertical direction, and/or a combination thereof. The multi-directional thermal actuator constructed on a surface of a substrate includes three or more beams each cantilevered from one or more anchors at a first end to extend generally parallel to the surface of the substrate. A member mechanically and electrically couples the distal ends of the beams. Application of current to a circuit comprising combinations of any two or more of the beams displaces the member in one of three or more non-parallel radial directions, respectively.
A multi-directional thermal actuator constructed on a surface of a substrate, the apparatus comprising:
A multi-directional thermal actuator constructed on a surface of a substrate, the apparatus comprising:
A multi-directional thermal actuator constructed on a surface of a substrate, the apparatus comprising:
Dependencies are inferred from the claim text.