B81B 2201/036
Micropumps
B81B2201/036 (Micropumps) appears on 90 US grants and 116 published applications in this corpus.
Search patents in B81B- Granted patents
- 90
- Published applications
- 116
- Assignees
- 55
- Inventors
- 210
- Latest grant
- 18 Aug 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1993 | 1 | 0 |
| 1994 | 0 | 0 |
| 1995 | 0 | 0 |
| 1996 | 0 | 0 |
| 1997 | 0 | 0 |
| 1998 | 0 | 0 |
| 1999 | 0 | 0 |
| 2000 | 0 | 0 |
| 2001 | 0 | 5 |
| 2002 | 5 | 4 |
| 2003 | 2 | 4 |
| 2004 | 4 | 1 |
| 2005 | 3 | 4 |
| 2006 | 3 | 2 |
| 2007 | 4 | 3 |
| 2008 | 0 | 8 |
| 2009 | 2 | 5 |
| 2010 | 3 | 6 |
| 2011 | 2 | 3 |
| 2012 | 6 | 5 |
| 2013 | 2 | 2 |
| 2014 | 7 | 3 |
| 2015 | 3 | 5 |
| 2016 | 2 | 4 |
| 2017 | 4 | 4 |
| 2018 | 4 | 4 |
| 2019 | 5 | 5 |
| 2020 | 3 | 7 |
| 2021 | 3 | 4 |
| 2022 | 4 | 6 |
| 2023 | 3 | 7 |
| 2024 | 6 | 5 |
| 2025 | 4 | 7 |
| 2026 | 5 | 3 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Mems device, nearfield loudspeaker, hearable, mems pump, loudspeaker and method for controlling an mems device18 Aug 2026US 12,709,536 B2Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e. V.
- MEMS device and apparatus having such a MEMS device7 Jul 2026US 12,673,865 B2Infineon Technologies AG
- MEMS device for interaction with fluids17 Mar 2026US 12,577,098 B2Robert Bosch GmbH
- MEMS having a large fluidically effective surface3 Mar 2026US 12,565,416 B2Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e. V.
- MEMS for highly efficient interaction with a volume flow27 Jan 2026US 12,534,359 B2Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e. V.
- Microfluidic conveying system and method for operating a microfluidic conveying system20 Aug 2026US 2026/0242207 A1
- Micro electro mechanical system device25 Jun 2026US 2026/0176129 A1Beijing BOE Technology Development Co., Ltd.
- Semiconductor device and operating method thereof12 Mar 2026US 2026/0076269 A1Taiwan Semiconductor Manufacturing Company.Ltd
- Microelectromechanical device for interaction with a fluid27 Nov 2025US 2025/0361141 A1
- Phase change active mems cooling system6 Nov 2025US 2025/0344348 A1
Most cited
By later US patents
- Microfabricated elastomeric valve and pump systems619US 6,408,878 B1California Institute of Technology · 2002
- Method of making a microfabricated elastomeric valve294US 6,793,753 B2California Institute of Technology · 2004
- Micropump with valve structure206US 5,259,737 ASeiko Epson Corporation · 1993
- Microfabricated elastomeric valve and pump systems198US 6,929,030 B2California Institute of Technology · 2005
- Microfabricated elastomeric valve and pump systems196US 7,144,616 B1California Institute of Technology · 2006