Mems device, nearfield loudspeaker, hearable, mems pump, loudspeaker and method for controlling an mems device
AssigneesFraunhofer-Gesellschaft zur Förderung der angewandten Forschung e. V., Robert Bosch GmbH
InventorsAnton Melnikov, Lutz Ehrig, Hermann Schenk
Life of this patent
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Abstract
An MEMS device includes a substrate with a substrate plane, a mass element having a rest position and configured to perform a deflection from the rest position parallel to the substrate plane and in a fluid surrounding the mass element. Further, the MEMS device includes a spring arrangement that is coupled between the substrate and the mass element and configured to deform based on the deflection. An actuator structure is provided that is coupled to the mass element by means of a coupling and configured to apply a force to the mass element by means of the coupling to cause the deflection and a movement of the fluid.
Claims33
A MEMS device, comprising:
- a substrate with a substrate plane;
- a mass element comprising a rest position and configured to perform deflection from the rest position in parallel to the substrate plane and in a fluid surrounding the mass element;
- a spring arrangement coupled between the substrate and the mass element and configured to deform based on the deflection;
- and
- an actuator structure coupled to the mass element by means of a coupling and configured to apply a force to the mass element by means of the coupling to cause the deflection and to cause a movement of the fluid.
A method for controlling an MEMS device comprising a substrate with a substrate plane;
- a mass element comprising a rest position and configured to perform deflection from the rest position in parallel to the substrate plane and in a fluid surrounding the mass element;
- a spring arrangement coupled between the substrate and the mass element and configured to deform based on the deflection;
- and an actuator structure coupled to the mass element and configured to apply a force to the mass element to cause the deflection and to cause a movement of the fluid, wherein the actuator structure is coupled to a volume via a first path and the mass element is coupled to the volume via a second path on a side facing away from the actuator structure;
- the method comprising:
- controlling the actuator structure to radiate a first sound pressure level with a first frequency range into the volume via the first path;
- and to radiate a second sound pressure level with a second different frequency range into the volume via the second path.
Dependencies are inferred from the claim text.