MEMS device and apparatus having such a MEMS device

An apparatus comprising:

• a protective structure;
• and
• a MEMS device comprising:
• a substrate comprising a cavity;
• a membrane structure mechanically connected to the substrate and configured for deflecting out-of-plane with regard to a substrate plane and with a frequency in an ultrasonic frequency range to cause a motion of a fluid in the cavity;
• a valve structure sandwiching the cavity together with the membrane structure, and the protective structure and membrane structure sandwiching the valve structure;
• wherein the valve structure comprises a planar perforated structure;
• wherein the valve structure comprises a shutter structure opposing the planar perforated structure and arranged moveably and with a resonance frequency in the ultrasonic frequency range and in-plane with regard to the substrate plane between a first position and a second position;
• wherein the shutter structure is arranged to provide a first fluidic resistance for the fluid in the first position and a second, higher fluidic resistance for the fluid in the second position;
• and
• wherein the valve structure comprises a plurality of valve structures, and wherein each of the plurality of valve structures comprise individually controlled valve structures that are controlled by an individual control signal, and wherein the plurality of valve structures comprises at least three valve structures.

A MEMS device comprising:

• a substrate including a cavity;
• a membrane structure mechanically connected to the substrate and configured to deflect out-of-plane with regard to a substrate plane and with a frequency in an ultrasonic frequency range;
• and
• a valve structure, the valve structure and the membrane structure sandwiching the cavity and the valve structure including:
• a planar perforated structure;
• and
• a shutter structure opposing the planar perforated structure and arranged moveably and with a frequency in the ultrasonic frequency range and in-plane relative to the substrate plane between a first position and a second position,
• wherein the valve structure comprises a plurality of valve structures, and wherein each of the plurality of valve structures comprise individually controlled valve structures that are controlled with an individual control signal, and wherein the plurality of valve structures comprises at least three valve structures.