MEMS for highly efficient interaction with a volume flow

A microelectromechanical systems (MEMS) with a layered structure comprising:

• a cavity disposed in the layered structure and fluidically coupled to an external environment of the layered structure through at least one opening in the layered structure;
• an interaction structure movably disposed in a first MEMS plane and in the cavity along a plane direction and adapted to interact with a fluid in the cavity, wherein movement of the interaction structure is causally related to the movement of the fluid through the at least one opening;
• an active structure disposed in a second MEMS plane perpendicular to the plane direction and mechanically coupled to the interaction structure;
• and configured such that an electrical signal at an electrical contact of the active structure is causally related to a deformation of the active structure;
• wherein the deformation of the active structure is causally related to the movement of the fluid;
• wherein along a thickness direction of the MEMS an extension of the interaction structure is larger than an extension of the active structure.