Micro electro mechanical system device

A micro electro mechanical system device, comprising:

• a pump portion, a valve portion, an air inlet, and an air outlet, an interval channel being provided between the pump portion and the valve portion, a gas being configured to sequentially pass through the air inlet, the pump portion, the interval channel, the valve portion, and the air outlet,
• wherein at least one of a side of the valve portion away from the air outlet and an inside of the valve portion is provided with an accommodating region, the gas is configured to be discharged from the air outlet after passing through the accommodating region;
• the micro electro mechanical system device comprises a first substrate, a first electrode layer, a second electrode layer, and a second substrate which are sequentially stacked, an interval is arranged between the first electrode layer and the second electrode layer, after the first electrode layer and the second electrode layer are configured to generate a voltage difference, a distance between the second electrode layer and the first electrode layer is reduced to provide a first gas channel configured to circulate the gas, or to block the first gas channel;
• the pump portion and the valve portion share the first substrate and the second substrate, the pump portion comprises a first electrode and a second electrode which are oppositely disposed, the valve portion comprises a third electrode and a fourth electrode which are oppositely disposed, the first electrode layer comprises the first electrode and the third electrode, the second electrode layer comprises the second electrode and the fourth electrode, the first electrode and the third electrode are insulated from each other, and/or, the second electrode and the fourth electrode are insulated from each other.