MEMS having a large fluidically effective surface
AssigneeFraunhofer-Gesellschaft zur Förderung der angewandten Forschung e. V.
InventorsSergiu Langa, Holger Conrad, Bert Kaiser
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AssigneeFraunhofer-Gesellschaft zur Förderung der angewandten Forschung e. V.
InventorsSergiu Langa, Holger Conrad, Bert Kaiser
Estimating the term…
An MEMS comprising a substrate having a cavity includes a movable layer arrangement arranged in the cavity including a first beam, a second beam and a third beam that is arranged between the first beam and the second beam and that is fixed at discrete areas electrically insulated from the same. The movable layer arrangement is configured to perform a movement along a direction of movement in a substrate plane in response to an electrical potential between a first beam and a third beam or in response to an electrical potential between the second beam and the third beam. The first, second, and third beams are part of a first layer of the movable layer arrangement. The movable layer arrangement includes a second layer arranged adjacent to the first layer along a direction perpendicular to the substrate plane. The second layer is arranged movably along the direction of movement.
A microelectromechanical system (MEMS), comprising:
Dependencies are inferred from the claim text.