B81B 2201/033
Comb drives
B81B2201/033 (Comb drives) appears on 253 US grants and 316 published applications in this corpus.
Search patents in B81B- Granted patents
- 253
- Published applications
- 316
- Assignees
- 129
- Inventors
- 496
- Latest grant
- 8 Sep 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1991 | 1 | 0 |
| 1992 | 0 | 0 |
| 1993 | 0 | 0 |
| 1994 | 0 | 0 |
| 1995 | 1 | 0 |
| 1996 | 1 | 0 |
| 1997 | 0 | 0 |
| 1998 | 0 | 0 |
| 1999 | 0 | 0 |
| 2000 | 2 | 0 |
| 2001 | 2 | 5 |
| 2002 | 4 | 7 |
| 2003 | 7 | 6 |
| 2004 | 9 | 12 |
| 2005 | 2 | 10 |
| 2006 | 9 | 9 |
| 2007 | 5 | 8 |
| 2008 | 9 | 9 |
| 2009 | 8 | 4 |
| 2010 | 4 | 9 |
| 2011 | 7 | 10 |
| 2012 | 5 | 6 |
| 2013 | 7 | 8 |
| 2014 | 11 | 2 |
| 2015 | 4 | 10 |
| 2016 | 5 | 10 |
| 2017 | 8 | 17 |
| 2018 | 9 | 13 |
| 2019 | 18 | 11 |
| 2020 | 11 | 20 |
| 2021 | 17 | 36 |
| 2022 | 11 | 17 |
| 2023 | 26 | 20 |
| 2024 | 28 | 19 |
| 2025 | 12 | 23 |
| 2026 | 10 | 15 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Micromechanical arm array for mems actuators8 Sep 2026US 12,729,109 B2Taiwan Semiconductor Manufacturing Company.Ltd
- Micro-electro-mechanical systems and preparation method thereof25 Aug 2026US 12,715,762 B2Huawei Technologies Co., Ltd.
- Microelectromechanical system for moving a mechanical part in two opposite directions11 Aug 2026US 12,706,551 B2Centre National de la Recherche Scientifique (CNRS)
- Electromechanical microsystem for moving a mechanical part in two opposite directions30 Jun 2026US 12,671,352 B2Centre National de la Recherche Scientifique (CNRS)
- Dual micro-electro mechanical system and manufacturing method thereof7 Apr 2026US 12,595,167 B2Taiwan Semiconductor Manufacturing Company.Ltd
- Micromechanical arm array for mems actuators8 Oct 2026US 2026/0307981 A1Taiwan Semiconductor Manufacturing Company.Ltd
- Bonding pillar structure for hidden comb microelectromechanical system17 Sep 2026US 2026/0280449 A1Lumentum Operations LLC
- Microfluidic conveying system and method for operating a microfluidic conveying system20 Aug 2026US 2026/0242207 A1
- Mems comprising a comb drive, and method for producing same6 Aug 2026US 2026/0225874 A1Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e. V.
- Dual micro-electro mechanical system and manufacturing method thereof23 Jul 2026US 2026/0209033 A1Taiwan Semiconductor Manufacturing Company.Ltd
Most cited
By later US patents
- Laterally driven resonant microstructures419US 5,025,346 AThe Regents of the University of California · 1991
- Compact electrostatic comb actuator113US 6,133,670 ASandia Corporation · 2000
- Electro-actuated microlens assemblies90US 6,091,537 AXerox Corporation · 2000
- Microelectromechanical optical switch and method of manufacture thereof83US 6,229,640 B1ADC Telecommunications, Inc. · 2001
- Apparatus and method for 2-dimensional steered-beam NxM optical switch using single-axis mirror arrays and relay optics77US 6,330,102 B1Onix Microsystems, Inc. · 2001