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US 12,595,167 B2Granted
Dual micro-electro mechanical system and manufacturing method thereof
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsYang-Che Chen, Victor Chiang Liang, Chen-Hua Lin, Chwen-Ming Liu, Huang-Wen Tseng, Yi-Chuan Teng
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Abstract
A micro electro mechanical system (MEMS) includes a circuit substrate, a first MEMS structure disposed over the circuit substrate, and a second MEMS structure disposed over the first MEMS structure.
Claims20
A device, comprising:
- a substrate;
- a first structure disposed over the substrate;
- a second structure disposed over the first structure;
- and
- a cover disposed over the second structure,
- wherein the first structure includes a first capacitance sensor configured to detect movement along a first direction and a second capacitance sensor configured to detect movement along a second direction perpendicular to the first direction,
- the first structure includes one or more first anchors and a first proof mass, wherein the first proof mass is supported by one or more springs each connected to one of the one or more first anchors,
- the second structure includes a second anchor and a second proof mass, wherein the second anchor is connected to one of the one or more first anchors by a first via electrode, and
- the second proof mass is connected to the first proof mass by a second via electrode.
6 more elements
A device, comprising:
- a substrate;
- a first structure disposed over the substrate;
- a second structure disposed over the first structure;
- and
- a cover disposed over the second structure,
- wherein the first structure includes one or more first anchors and a first proof mass and the first proof mass is supported by one or more springs each connected to one of the one or more first anchors, and
- one or more recesses are formed at a bottom of the first proof mass facing the substrate.
4 more elements
A device, comprising:
- a substrate;
- a first structure disposed over the substrate;
- a second structure disposed over the first structure;
- and
- a cover disposed over the second structure,
- wherein the first structure includes:
- one or more of first anchors, a plurality of first electrodes arranged along a first direction and coupled to one of the one or more first anchors, and a plurality of second electrodes arranged along the first direction and coupled to a first proof mass, and
- wherein the first electrodes and second electrodes are alternately arranged along the first direction.
5 more elements
Dependencies are inferred from the claim text.